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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 6 — Mar. 24, 2014
  • pp: 6486–6494

Vibration-insensitive measurement of thickness variation of glass panels using double-slit interferometry

Jong-Ahn Kim, Jae Wan Kim, Tae Bong Eom, Jonghan Jin, and Chu-Shik Kang  »View Author Affiliations

Optics Express, Vol. 22, Issue 6, pp. 6486-6494 (2014)

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A technique which can measure thickness variation of a moving glass plate in real-time with nanometric resolution is proposed. The technique is based on the double-slit interference of light. Owing to the nature of differential measurement scheme, the measurement system is immune to harsh environmental condition of a production line, and the measurement results are not affected by the swaying motion of the panel. With the preliminary experimental setup with scanning speed of 100 mm/s, the measurement repeatability was 3 nm for the waviness component of the thickness profile, filtered with a Gaussian filter with cutoff wavelength of 8 mm.

© 2014 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: January 13, 2014
Revised Manuscript: February 27, 2014
Manuscript Accepted: March 4, 2014
Published: March 12, 2014

Jong-Ahn Kim, Jae Wan Kim, Tae Bong Eom, Jonghan Jin, and Chu-Shik Kang, "Vibration-insensitive measurement of thickness variation of glass panels using double-slit interferometry," Opt. Express 22, 6486-6494 (2014)

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