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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 6 — Mar. 24, 2014
  • pp: 6810–6821

Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics

Yeghishe Tsaturyan, Andreas Barg, Anders Simonsen, Luis Guillermo Villanueva, Silvan Schmid, Albert Schliesser, and Eugene S. Polzik  »View Author Affiliations

Optics Express, Vol. 22, Issue 6, pp. 6810-6821 (2014)

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Dielectric membranes with exceptional mechanical and optical properties present one of the most promising platforms in quantum opto-mechanics. The performance of stressed silicon nitride nanomembranes as mechanical resonators notoriously depends on how their frame is clamped to the sample mount, which in practice usually necessitates delicate, and difficult-to-reproduce mounting solutions. Here, we demonstrate that a phononic bandgap shield integrated in the membrane’s silicon frame eliminates this dependence, by suppressing dissipation through phonon tunneling. We dry-etch the membrane’s frame so that it assumes the form of a cm-sized bridge featuring a 1-dimensional periodic pattern, whose phononic density of states is tailored to exhibit one, or several, full band gaps around the membrane’s high-Q modes in the MHz-range. We quantify the effectiveness of this phononic bandgap shield by optical interferometry measuring both the suppressed transmission of vibrations, as well as the influence of frame clamping conditions on the membrane modes. We find suppressions up to 40 dB and, for three different realized phononic structures, consistently observe significant suppression of the dependence of the membrane’s modes on sample clamping—if the mode’s frequency lies in the bandgap. As a result, we achieve membrane mode quality factors of 5 × 106 with samples that are tightly bolted to the 8 K-cold finger of a cryostat. Q × f -products of 6 × 1012 Hz at 300 K and 14 × 1012 Hz at 8 K are observed, satisfying one of the main requirements for optical cooling of mechanical vibrations to their quantum ground-state.

© 2014 Optical Society of America

OCIS Codes
(120.7280) Instrumentation, measurement, and metrology : Vibration analysis
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3990) Optical devices : Micro-optical devices
(160.3918) Materials : Metamaterials
(120.4880) Instrumentation, measurement, and metrology : Optomechanics

ToC Category:
Photonic Crystals

Original Manuscript: January 2, 2014
Revised Manuscript: March 3, 2014
Manuscript Accepted: March 8, 2014
Published: March 17, 2014

Yeghishe Tsaturyan, Andreas Barg, Anders Simonsen, Luis Guillermo Villanueva, Silvan Schmid, Albert Schliesser, and Eugene S. Polzik, "Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics," Opt. Express 22, 6810-6821 (2014)

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