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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 7 — Apr. 7, 2014
  • pp: 7574–7580

SPR phase detection for measuring the thickness of thin metal films

Chao Liu, Qinggang Liu, and Xiaotang Hu  »View Author Affiliations


Optics Express, Vol. 22, Issue 7, pp. 7574-7580 (2014)
http://dx.doi.org/10.1364/OE.22.007574


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Abstract

In this paper, a novel method to determine the thickness of thin metal film is put forward which uses Surface Plasmon Resonance (SPR) phase detection method. The relations between the metal film thickness and the phases of the transverse magnetic (TM) and transverse electric (TE) polarization of the reflected light are shown in the simulation results. By recording the interference patterns which contain the information of the phase differences in the experiments, the values of thickness are calculated. Both of the theoretical analysis and experimental results indicate that the approach presented is feasible and reliable. Thus, it is possible to use the method of phase detection to determine the thickness of thin metal films within 100nm in SPR prism couplers directly with nanometer resolution.

© 2014 Optical Society of America

OCIS Codes
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(240.0310) Optics at surfaces : Thin films
(240.6680) Optics at surfaces : Surface plasmons

ToC Category:
Plasmonics

History
Original Manuscript: January 6, 2014
Revised Manuscript: February 17, 2014
Manuscript Accepted: March 5, 2014
Published: March 25, 2014

Citation
Chao Liu, Qinggang Liu, and Xiaotang Hu, "SPR phase detection for measuring the thickness of thin metal films," Opt. Express 22, 7574-7580 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-7-7574


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References

  1. B. Liedberg, C. Nylander, I. Lunström, “Surface plasmon resonance for gas detection and biosensing,” Sens. Actuators B Chem. 4, 299–304 (1983). [CrossRef]
  2. R. B. M. Schasfoort and A. J. Tudos, Handbook of Surface Plasmon Resonance (Royal Society of Chemistry, 2008).
  3. R. Levy, A. Peled, S. Ruschin, “Waveguided SPR sensor using a Mach-Zehnder interferometer with variable power splitting ratio,” Sens. Actuators B Chem. 119(1), 20–26 (2006). [CrossRef]
  4. M. Piliarik, J. Homola, “Surface plasmon resonance (SPR) sensors: approaching their limits?” Opt. Express 17(19), 16505–16517 (2009). [CrossRef] [PubMed]
  5. Z. X. Geng, Q. Li, W. Wang, Z. H. Li, “PDMS prism-glass optical coupling for surface plasmon resonance sensors based on MEMS technology,” Sci. China Inf. Sci. 53(10), 2144–2158 (2010). [CrossRef]
  6. C. Caucheteur, Y. Shevchenko, L.-Y. Shao, M. Wuilpart, J. Albert, “High resolution interrogation of tilted fiber grating SPR sensors from polarization properties measurement,” Opt. Express 19(2), 1656–1664 (2011). [CrossRef] [PubMed]
  7. A. Shalabney, I. Abdulhalim, “Figure-of-merit enhancement of surface plasmon resonance sensors in the spectral interrogation,” Opt. Lett. 37(7), 1175–1177 (2012). [CrossRef] [PubMed]
  8. K. Sathiyamoorthy, B. Ramya, V. M. Murukeshan, X. W. Sun, “Modified two prism SPR sensor configurations to improve the sensitivity of measurement,” Sens. Actuators A Phys. 191, 73–77 (2013). [CrossRef]
  9. A. V. Kabashin, P. I. Nikitin, “Surface-plasmon resonance interferometer for bio- and chemical-sensors,” Opt. Commun. 150(1-6), 5–8 (1998). [CrossRef]
  10. A. V. Kabashin, V. E. Kochergin, P. I. Nikitin, “Surface plasmon resonance bio- and chemical sensors with phase-polarisation contrast,” Sens. Actuators B Chem. 54(1-2), 51–56 (1999). [CrossRef]
  11. H. P. Ho, W. W. Lam, S. Y. Wu, “Surface plasmon resonance sensor based on the measurement of differential phase,” Rev. Sci. Instrum. 73(10), 3534–3539 (2002). [CrossRef]
  12. H. P. Ho, W. W. Lam, “Application of differential phase measurement technique to surface plasmon resonance sensors,” Sens. Actuators B Chem. 96(3), 554–559 (2003). [CrossRef]
  13. Y. H. Huang, H. P. Ho, S. K. Kong, A. V. Kabashin, “Phase‐sensitive surface plasmon resonance biosensors: methodology, instrumentation and applications,” Ann. Phys. 524(11), 637–662 (2012). [CrossRef]
  14. T.-J. Wang, C.-W. Hsieh, “Surface plasmon resonance biosensor based on electro-optically modulated phase detection,” Opt. Lett. 32(19), 2834–2836 (2007). [CrossRef] [PubMed]
  15. S. Patskovsky, M. Vallieres, M. Maisonneuve, I. H. Song, M. Meunier, A. V. Kabashin, “Designing efficient zero calibration point for phase-sensitive surface plasmon resonance biosensing,” Opt. Express 17(4), 2255–2263 (2009). [CrossRef] [PubMed]
  16. T. Yang, H. P. Ho, “Computational investigation of nanohole array based SPR sensing using phase shift,” Opt. Express 17(13), 11205–11216 (2009). [CrossRef] [PubMed]
  17. A. V. Kabashin, S. Patskovsky, A. N. Grigorenko, “Phase and amplitude sensitivities in surface plasmon resonance bio and chemical sensing,” Opt. Express 17(23), 21191–21204 (2009). [CrossRef] [PubMed]
  18. Y. H. Huang, H. P. Ho, S. Y. Wu, S. K. Kong, W. W. Wong, P. Shum, “Phase sensitive SPR sensor for wide dynamic range detection,” Opt. Lett. 36(20), 4092–4094 (2011). [CrossRef] [PubMed]
  19. H. Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings (Springer-Verlag, 1988).
  20. M. Piliarik and J. Homola, SPR Sensor Instrumentation (Springer-Verlag, 2006).
  21. J. Homola and J. Dostálek, Surface Plasmon Resonance Based Sensors (Springer-Verlag, 2006).
  22. Y. Ding, Z. Q. Cao, Q. S. Shen, “Improved SPR technique for determination of the thickness and optical constants of thin metal films,” Opt. Quantum Electron. 35(12), 1091–1097 (2003). [CrossRef]
  23. J. H. Gu, Z. Q. Cao, Q. S. Shen, G. Chen, “Determination of thickness and optical constants of thin metal films with an extended ATR spectrum,” J. Phys. D Appl. Phys. 41(15), 155309 (2008). [CrossRef]
  24. J. D. Xin, Q. G. Liu, C. Liu, T. T. Li, S. Y. Liu, “Phase Detection for Nanometer Scale Metal Film’s Thickness Based on SPR Effect,” Adv. Mater. Res. 320, 377–381 (2011). [CrossRef]
  25. C. Liu, Q. G. Liu, T. T. Li, “Research of SPR Phase Detection for Measuring Ultra Thin Metal Film,” Key Eng. Mater. 562–565, 896–901 (2013). [CrossRef]
  26. M. Born and E. Wolf, Principles of Optics 7th ed. (Cambridge University Press, 1999).
  27. J. H. Weaver and H. P. R. Frederikse, Optical Properties of Selected Elements 82 ed. (CRC Press, 2001).

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