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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 7 — Apr. 7, 2014
  • pp: 7811–7820

A 64-pixel NbTiN superconducting nanowire single-photon detector array for spatially resolved photon detection

Shigehito Miki, Taro Yamashita, Zhen Wang, and Hirotaka Terai  »View Author Affiliations

Optics Express, Vol. 22, Issue 7, pp. 7811-7820 (2014)

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We present the characterization of two-dimensionally arranged 64-pixel NbTiN superconducting nanowire single-photon detector (SSPD) array for spatially resolved photon detection. NbTiN films deposited on thermally oxidized Si substrates enabled the high-yield production of high-quality SSPD pixels, and all 64 SSPD pixels showed uniform superconducting characteristics within the small range of 7.19–7.23 K of superconducting transition temperature and 15.8–17.8 μA of superconducting switching current. Furthermore, all of the pixels showed single-photon sensitivity, and 60 of the 64 pixels showed a pulse generation probability higher than 90% after photon absorption. As a result of light irradiation from the single-mode optical fiber at different distances between the fiber tip and the active area, the variations of system detection efficiency (SDE) in each pixel showed reasonable Gaussian distribution to represent the spatial distributions of photon flux intensity.

© 2014 Optical Society of America

OCIS Codes
(040.5160) Detectors : Photodetectors
(270.5570) Quantum optics : Quantum detectors

ToC Category:

Original Manuscript: January 17, 2014
Revised Manuscript: March 14, 2014
Manuscript Accepted: March 19, 2014
Published: March 27, 2014

Virtual Issues
May 12, 2014 Spotlight on Optics

Shigehito Miki, Taro Yamashita, Zhen Wang, and Hirotaka Terai, "A 64-pixel NbTiN superconducting nanowire single-photon detector array for spatially resolved photon detection," Opt. Express 22, 7811-7820 (2014)

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