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Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 22, Iss. 8 — Apr. 21, 2014
  • pp: 9659–9666

Adiabatically widened silicon microrings for improved variation tolerance

Jared C. Mikkelsen, Wesley D. Sacher, and Joyce K. S. Poon  »View Author Affiliations


Optics Express, Vol. 22, Issue 8, pp. 9659-9666 (2014)
http://dx.doi.org/10.1364/OE.22.009659


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Abstract

We show that silicon microrings with adiabatically widened bends are more tolerant to dimensional variations than conventional microring designs with uniform waveguide widths. Through wafer-scale measurements of test structures fabricated in the IMEC Standard Passives process (193 nm DUV lithography, 200 mm SOI wafer), improvements in the intra-die and wafer-scale variation of the resonance wavelength are demonstrated. A 2.1× reduction in the standard deviation of the resonance wavelength across the wafer was observed.

© 2014 Optical Society of America

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.5750) Optical devices : Resonators
(230.7408) Optical devices : Wavelength filtering devices

ToC Category:
Integrated Optics

History
Original Manuscript: January 31, 2014
Revised Manuscript: April 1, 2014
Manuscript Accepted: April 4, 2014
Published: April 15, 2014

Citation
Jared C. Mikkelsen, Wesley D. Sacher, and Joyce K. S. Poon, "Adiabatically widened silicon microrings for improved variation tolerance," Opt. Express 22, 9659-9666 (2014)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-22-8-9659


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