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Optics Express

Optics Express

  • Editor: J. H. Eberly
  • Vol. 6, Iss. 13 — Jun. 19, 2000
  • pp: 257–261

Delivery of F2-excimer laser light by aluminum hollow fibers

Yuji Matsuura, Takashi Yamamoto, and Mitsunobu Miyagi  »View Author Affiliations

Optics Express, Vol. 6, Issue 13, pp. 257-261 (2000)

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A hollow fiber composed of a glass-tube substrate and an aluminum thin film coated upon the inside of the tube delivers F2-excimer laser light. A smooth, aluminum thin film was deposited by using metal-organic chemical vapor deposition using dimethylethylamine:alane (DMEAA) as the precursor. It was shown that the transmission loss of the fiber with a 1.0-mm inner diameter was as low as 0.5 dB/m for the fiber with 1.0-mm diameter when the bore of the fiber is pressurized with an inert gas to remove the absorption of air. When the fiber is bent at the radius of 30 cm, the additional loss was 1.6 dB.

© Optical Society of America

OCIS Codes
(060.2310) Fiber optics and optical communications : Fiber optics
(140.2180) Lasers and laser optics : Excimer lasers

ToC Category:
Research Papers

Original Manuscript: June 6, 2000
Published: June 19, 2000

Yuji Matsuura, Takashi Yamamoto, and Mitsunobu Miyagi, "Delivery of F2-excimer laser light by aluminum hollow fibers," Opt. Express 6, 257-261 (2000)

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