Sub-diffraction limited structuring of solid targets with femtosecond laser pulses

doi:10.1364/OE.7.000041

Optics Express

Editor: J. H. Eberly
Vol. 7, Iss. 2 — Jul. 17, 2000
pp: 41–49

Sub-diffraction limited structuring of solid targets with femtosecond laser pulses

Frank Korte, S. Adams, Andre Egbert, Carsten Fallnich, A. Ostendorf, Stefan Nolte, M. Will, J.-P. Ruske, Boris Chichkov, and Andreas Tuennermann »View Author Affiliations

Optics Express, Vol. 7, Issue 2, pp. 41-49 (2000)
http://dx.doi.org/10.1364/OE.7.000041

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Abstract

Possibilities to produce sub-diffraction limited structures in thin metal films and bulk dielectric materials using femtosecond laser pulses are investigated. The physics of ultrashort pulse laser ablation of solids is outlined. Results on the fabrication of sub-micrometer structures in 100–200 nm chrome-coated surfaces by direct ablative writing are reported. Polarization maintaining optical waveguides produced by femtosecond laser pulses inside crystalline quartz are demonstrated.

[Optical Society of America ]

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.7370) Optical devices : Waveguides

ToC Category:
Focus Issue: Laser ablation

History
Original Manuscript: May 16, 2000
Published: July 17, 2000

Citation
Frank Korte, S. Adams, Andre Egbert, Carsten Fallnich, A. Ostendorf, Stefan Nolte, M. Will, J.-P. Ruske, Boris Chichkov, and Andreas Tuennermann, "Sub-diffraction limited structuring of solid targets with femtosecond laser pulses," Opt. Express 7, 41-49 (2000)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-7-2-41

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References

P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du and G. Mourou, "Machining of sub-micron holes using a femtosecond laser at 800 nm," Opt. Commun. 114, 106-110 (1995). [CrossRef]
C. Momma, B.N. Chichkov, S.Nolte, F. von Alvensleben, A. Tunnermann and H. Welling, "Short-pulse laser ablation of solid targets," Opt. Commun. 129, 134-142 (1996); B.N. Chichko , C. Momma, S.Nolte, F. von Alvensleben and A.Tunnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996). [CrossRef]
B.C. Stuart, M.D. Feit, S. Herman, A.M. Rubenchik, B.W. Shore, and M.D. Perry, "Optical ablation by high-power short-pulse lasers," J. Opt. Soc. Am. B 13, 459-468 (1996). [CrossRef]
W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, "Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps," Appl. Phys. Lett. 69, 3146-3148 (1996). [CrossRef]
S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichko , B. Wellegehausen, and H. Welling, "Ablation of metals by ultrashort laser pulses," J. Opt. Soc. Am. B 14, 2716-2722 (1997). [CrossRef]
see Laser Ablation, Proceedings of the 5th International Conference, Eds. J.S. Horwitz, H.-U. Krebs, K. Murakami, and M. Stuke, in Appl. Phys. A 69 [Suppl], 1999.
S. Nolte, B.N. Chichko , H. Welling, Y. Shani, K. Lieberman, and H. Terkel, "Nanostructuring with spatiall localized femtosecond laser pulses," Opt. Lett. 24, 914-916 (1999). [CrossRef]
N.W. Ashcroft and N.D. Mermin, Solid State Physics (Saunders College Publishing, New York, 1976).
A.A. Abrikoso , Fundamentals of the Theory of Metals (North-Holland, Amsterdam, 1988).
A.P. Kanavin, I.V. Smetanin, V.A. Isakov, Yu.V. Afanasiev, B.N. Chichko , B. Wellegehausen, S. Nolte, C. Momma, and A. Tünnermann, "Heat transport in metals irradiated by ultrashort laser pulses," Phys. Rev. B 57, 14698-14703 (1998). [CrossRef]
A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, "Ultrashort-laser-pulse damage threshold of transparent materials and the role of incubation," Appl. Phys. A 69, S373-S376 (1999). [CrossRef]
K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten optical waveguides in various glasses," Appl. Phys. Lett. 71, 3329-3331 (1997). [CrossRef]
C.B. Schaffer, A. Brodeur, J.F. Garcia, W.A. Leight, and E. Mazur, "Micromachining optical waveguides in bulk glass using a femtosecond laser oscillator," http://mazur-www.harvard.edu/Library/Publications/pdf files/Pub 262.pdf

Other

P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du and G. Mourou, "Machining of sub-micron holes using a femtosecond laser at 800 nm," Opt. Commun. 114, 106-110 (1995). [CrossRef]
C. Momma, B.N. Chichkov, S.Nolte, F. von Alvensleben, A. Tunnermann and H. Welling, "Short-pulse laser ablation of solid targets," Opt. Commun. 129, 134-142 (1996); B.N. Chichko , C. Momma, S.Nolte, F. von Alvensleben and A.Tunnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Appl. Phys. A 63, 109-115 (1996). [CrossRef]
B.C. Stuart, M.D. Feit, S. Herman, A.M. Rubenchik, B.W. Shore, and M.D. Perry, "Optical ablation by high-power short-pulse lasers," J. Opt. Soc. Am. B 13, 459-468 (1996). [CrossRef]
W. Kautek, J. Krüger, M. Lenzner, S. Sartania, C. Spielmann, and F. Krausz, "Laser ablation of dielectrics with pulse durations between 20 fs and 3 ps," Appl. Phys. Lett. 69, 3146-3148 (1996). [CrossRef]
S. Nolte, C. Momma, H. Jacobs, A. Tünnermann, B.N. Chichko , B. Wellegehausen, and H. Welling, "Ablation of metals by ultrashort laser pulses," J. Opt. Soc. Am. B 14, 2716-2722 (1997). [CrossRef]
see Laser Ablation, Proceedings of the 5th International Conference, Eds. J.S. Horwitz, H.-U. Krebs, K. Murakami, and M. Stuke, in Appl. Phys. A 69 [Suppl], 1999.
S. Nolte, B.N. Chichko , H. Welling, Y. Shani, K. Lieberman, and H. Terkel, "Nanostructuring with spatiall localized femtosecond laser pulses," Opt. Lett. 24, 914-916 (1999). [CrossRef]
N.W. Ashcroft and N.D. Mermin, Solid State Physics (Saunders College Publishing, New York, 1976).
A.A. Abrikoso , Fundamentals of the Theory of Metals (North-Holland, Amsterdam, 1988).
A.P. Kanavin, I.V. Smetanin, V.A. Isakov, Yu.V. Afanasiev, B.N. Chichko , B. Wellegehausen, S. Nolte, C. Momma, and A. Tünnermann, "Heat transport in metals irradiated by ultrashort laser pulses," Phys. Rev. B 57, 14698-14703 (1998). [CrossRef]
A. Rosenfeld, M. Lorenz, R. Stoian, and D. Ashkenasi, "Ultrashort-laser-pulse damage threshold of transparent materials and the role of incubation," Appl. Phys. A 69, S373-S376 (1999). [CrossRef]
K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, "Photowritten optical waveguides in various glasses," Appl. Phys. Lett. 71, 3329-3331 (1997). [CrossRef]
C.B. Schaffer, A. Brodeur, J.F. Garcia, W.A. Leight, and E. Mazur, "Micromachining optical waveguides in bulk glass using a femtosecond laser oscillator," http://mazur-www.harvard.edu/Library/Publications/pdf files/Pub 262.pdf

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