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Optics Express

Optics Express

  • Editor: J. H. Eberly
  • Vol. 7, Iss. 2 — Jul. 17, 2000
  • pp: 41–49

Sub-diffraction limited structuring of solid targets with femtosecond laser pulses

F. Korte, S. Adams, A. Egbert, C. Fallnich, A. Ostendorf, S. Nolte, M. Will, J.-P. Ruske, B. N. Chichkov, and A. Tünnermann  »View Author Affiliations

Optics Express, Vol. 7, Issue 2, pp. 41-49 (2000)

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Possibilities to produce sub-diffraction limited structures in thin metal films and bulk dielectric materials using femtosecond laser pulses are investigated. The physics of ultrashort pulse laser ablation of solids is outlined. Results on the fabrication of sub-micrometer structures in 100–200 nm chrome-coated surfaces by direct ablative writing are reported. Polarization maintaining optical waveguides produced by femtosecond laser pulses inside crystalline quartz are demonstrated.

© Optical Society of America

OCIS Codes
(140.7090) Lasers and laser optics : Ultrafast lasers
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.7370) Optical devices : Waveguides

ToC Category:
Focus Issue: Laser ablation

Original Manuscript: May 16, 2000
Published: July 17, 2000

Frank Korte, S. Adams, Andre Egbert, Carsten Fallnich, A. Ostendorf, Stefan Nolte, M. Will, J.-P. Ruske, Boris Chichkov, and Andreas Tuennermann, "Sub-diffraction limited structuring of solid targets with femtosecond laser pulses," Opt. Express 7, 41-49 (2000)

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  1. P.P. Pronko, S.K. Dutta, J. Squier, J.V. Rudd, D. Du and G. Mourou, "Machining of sub-micron holes using a femtosecond laser at 800 nm," Opt. Commun. 114, 106-110 (1995). [CrossRef]
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