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Optics Express

Optics Express

| THE INTERNATIONAL ELECTRONIC JOURNAL OF OPTICS

  • Editor: J. H. Eberly
  • Vol. 7, Iss. 2 — Jul. 17, 2000
  • pp: 56–67

Industrial applications of laser micromachining

Malcolm Charles Gower

Optics Express, Vol. 7, Issue 2, pp. 56-67        doi:10.1364/OE.7.000056

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  • OCIS Codes:
  • (140.3390) Lasers and laser optics : Laser materials processing
  • (220.4000) Optical design and fabrication : Microstructure fabrication

Citation
Malcolm Charles Gower, "Industrial applications of laser micromachining," Opt. Express 7, 56-67 (2000)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-7-2-56

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Abstract

The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electro-mechanical system (MEMS) fabrication applications are reviewed.

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» View Full Text: Acrobat PDF (463 KB)

History
Original Manuscript: May 24, 2000
Published: July 17, 2000

References

  1. N. Bloembergen, "Laser-material interactions, fundamentals and applications," in Laser Ablation: Mechanisms and Applications II, AIP Conf. Proc. J. C. Miller & D. B. Geohegan eds., 288 (1994).
  2. J. C. Miller, 'History, scope and the future of laser ablation', in Laser Ablation, Principles and Applications, J. C. Miller ed., Springer-Verlag (1994).
  3. Y. Kawamura, K. Toyoda and S. Namba, "Effective deep ultraviolet photoetching of polymethyl methacrylate by an excimer laser," Appl. Phys. Lett. 40, 374 (1982).
  4. R. Srinivasan and V. Mayne-Banton, "Self-developing photoetching of poly(ethylene terephthalate) films by far ultraviolet excimer laser radiation," Appl. Phys. Lett. 41, 576 (1982).
  5. S. D. Allen, M. Bass and M. L. Teisniger, "Comparison of pulsed Nd:YAG and pulsed CO2 lasers for hole drilling in printed circuit board materials," CLEO Conference Summary (1982).
  6. M. N. Watson, "Laser drilling of printed circuit boards," Circuit World, 11, 13 (1984).
  7. F. Bachman, "Excimer lasers in a fabrication line for a highly integrated printed circuit board," Chemtronics 4, 149 (1989).
  8. J. R. Lankard and G. E. Wolbold, "Laser ablation of polyimide in a manufacturing facility," Appl. Phys. A54, 355 (1992).
  9. R. S. Patel, T. F. Redmond, C. Tessler, D. Tudryn and D. Pulaski, "Via production benefits from excimer laser tools," Laser Focus World (Jan 1996).
  10. H. Holden, "Microvia PCB's:the next generation of substrates & packages," Future Circuits International 1, 71 (1997).
  11. C. Rowan, "Excimer lasers drill precise holes with higher yields," Laser Focus World (Aug 1995).
  12. A. South, "Miniaturization of Medical Products: The Development Challenge," Medical Device Technology 9, 30 (1998).
  13. M. C. Gower, "Excimer lasers for surgery and biomedical fabrication," in Nanotechnology in Medicine and the Biosciences, R R H Coombs & D W Robinson eds, Gordon & Breach (1996).
  14. R. S. Gifford & D J Bartnik. "Using optical sensors to measure arterial blood gases," Opt. & Photonics News 9, 27 (Mar 1998).
  15. S. Kiyama, T. Matsuoka, Y. Hirano, S. Nakano, M. Osumi, Y. Kuwano, "Laser patterning of integrated-type a-Si solar cell submodules," JSPE, 11, 2069, (1990).
  16. A. B. Frazier, R. O. Warrington and C. Friedrich, "The Miniaturization Technologies: Past, Present and Future," IEEE Trans. on Industrial Electronics, 42, No5, 423 (1995).
  17. E. C. Harvey and P. T. Rumsby, 'Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser mask projection' in Micromachining and microfabrication process technology III, Proc. SPIE 3223, 26 (1997).
  18. R. Pethig, J. P. H. Burt, A. Parton, N. H. Rizvi, M. S. Talary and J. A. Tame, 'Development of biofactory on a chip technology using excimer laser micromachining' J. Micromech. Microeng. 8, 57 (1999).
  19. W. Bacher, W. Menz and J. Mohr, 'The LIGA Technique and its potential for Microsystems - A Survey', IEEE Trans. on Industrial Electronics, 42, No5, 431 (1995).
  20. P. McKeown, 'Nanotechnology' in Emerging Technology Series: New and Advanced Materials, UN Industrial Development Organization 1 (1997).

Author Affiliations

Malcolm Charles Gower

Exitech Ltd.

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