Industrial applications of laser micromachining
Optics Express, Vol. 7, Issue 2, pp. 56-67 doi:10.1364/OE.7.000056
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- OCIS Codes:
- (140.3390) Lasers and laser optics : Laser materials processing
- (220.4000) Optical design and fabrication : Microstructure fabrication
Citation
Malcolm Charles Gower, "Industrial applications of laser micromachining," Opt. Express 7, 56-67 (2000)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-7-2-56
Abstract
The use of pulsed lasers for microprocessing material in several manufacturing industries is presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film scribing and micro-electro-mechanical system (MEMS) fabrication applications are reviewed.
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History
Original Manuscript: May 24, 2000
Published: July 17, 2000
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Author Affiliations
Exitech Ltd.
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