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Optics Express

Optics Express

  • Editor: J. H. Eberly
  • Vol. 9, Iss. 3 — Jul. 30, 2001
  • pp: 141–151

Characterization of organic low-dielectric-constant materials using optical spectroscopy

K. Postava, T. Yamaguchi, and T. Nakano  »View Author Affiliations


Optics Express, Vol. 9, Issue 3, pp. 141-151 (2001)
http://dx.doi.org/10.1364/OE.9.000141


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Abstract

The dielectric function spectra of low dielectric constant (low-k) materials have been determined using high-precision four-zone null spectroscopic ellipsometry, near-normal incidence reflection spectrometry and Fourier transform infrared transmission spectroscopy. The optical functions over a wide spectral range from 0.03t o 5.4 eV (230 nm to 40.5 µm wavelength region) have been evaluated for representative low-k materials used in the semiconductor industry for inter-layer dielectrics: (1) FLARE – organic spin-on polymer, and (2) HOSP – spin-on hybrid organic-siloxane polymer from the Honeywell Electronic Materials Company.

© Optical Society of America

OCIS Codes
(160.4890) Materials : Organic materials
(260.2130) Physical optics : Ellipsometry and polarimetry
(300.6340) Spectroscopy : Spectroscopy, infrared
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Research Papers

History
Original Manuscript: April 12, 2001
Published: July 30, 2001

Citation
Kamil Postava, T. Yamaguchi, and T. Nakano, "Characterization of organic low-dielectric-constant materials using optical spectroscopy," Opt. Express 9, 141-151 (2001)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-9-3-141


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References

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