Angular dispersion compensation for acousto-optic devices used for ultrashort-pulsed laser micromachining
Optics Express, Vol. 9, Issue 4, pp. 200-206 (2001)
http://dx.doi.org/10.1364/OE.9.000200
Enhanced HTML 
Acrobat PDF (557 KB)
Abstract
Ultrashort pulsed laser material processing is a new micromachining method that is gaining interest. Its capability of submicrometer machining has been proved. To obtain high speed and highly flexible beam steering, a two-axis acousto-optic deflector is employed. However, dispersion associated with acoustic-optic interaction will cause serious spatial deformation on the writing spot. The compensation for dispersion is proposed and studied. Experiments show promising results. An additional advantage of the proposed compensation method is that it can also precisely control the pulse number, and, hence improve the quality of ablation.
© Optical Society of America
[Optical Society of America ]
OCIS Codes
(230.1040) Optical devices : Acousto-optical devices
(320.7160) Ultrafast optics : Ultrafast technology
ToC Category:
Research Papers
History
Original Manuscript: June 8, 2001
Published: August 13, 2001
Citation
B.K. Ann Ngoi, Krishnan Venkatakrishnan, L.E.N. Lim, and B. Tan, "Angular dispersion compensation for acousto-optic devices used for ultrashort-pulsed laser micromachining," Opt. Express 9, 200-206 (2001)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-9-4-200
Sort: Journal | Reset
References
- X. Liu, D. Du. and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716, (1997). [CrossRef]
- P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, "Machining of submicron holes using a femtosecond laser at 800nm," Opt. Commun. 114, 106-110 (1995). [CrossRef]
- X. Liu, "Submicron lines in thin metal films micromachined by an ultrafast laser oscillator," Conference on Lasers and Electro-Optics (CLEO/U.S.), Vol. 6 of 1998 OSA Technical Digest Series (Optical Society of America, Washington, D.C. 1998), p511.
- P. C. Allen and P. Buck, "Resolution performance of a 0.6NA, 364nm laser direct writer," Proc. SPIE, 1264, 454-465 (1990). [CrossRef]
Cited By |
 Alert me when this paper is cited |
OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.
Related Journal Articles 
- Double Gires—Tournois interferometer negative-dispersion mirrors for use in tunable mode-locked lasers (OL)
- Broadband monolithic acousto-optic tunable filter (OL)
- Amplitude and phase control of ultrashort pulses by use of an acousto-optic programmable dispersive filter: pulse compression and shaping (OL)
- Optoelectronic delay-time controller for laser pulses (OL)
- Closed-loop carrier-envelope phase stabilization with an acousto-optic programmable dispersive filter (OL)
Related Conference Papers
- All-fiber wavelength-tunable acousto-optic switch
- Ultrashort pulse switching in a lossy acousto-optic tunable filter(AOTF)
- Ultrafast synchronous all-optical time division multiplexing system demonstration
- 1 THz Repetition Rate Multichannel Pulse Train Source using an Arrayed Waveguide Grating
- Generation and Coherent Time-Division Demultiplexing of up to 5.1 Tb/s Single-Channel 8-PSK and 16-QAM Signals
- Generation and Coherent Time-Division Demultiplexing of up to 5.1 Tb/s Single-Channel 8-PSK and 16-QAM Signals
« Previous Article | Next Article »
OSA is a member of 