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Optics Express

Optics Express

  • Editor: J. H. Eberly
  • Vol. 9, Iss. 4 — Aug. 13, 2001
  • pp: 200–206

Angular dispersion compensation for acousto-optic devices used for ultrashort-pulsed laser micromachining

B. K. A. Ngoi, K. Venkatakrishnan, B. Tan, P. Stanley, and L. E. N. Lim  »View Author Affiliations


Optics Express, Vol. 9, Issue 4, pp. 200-206 (2001)
http://dx.doi.org/10.1364/OE.9.000200


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Abstract

Ultrashort pulsed laser material processing is a new micromachining method that is gaining interest. Its capability of submicrometer machining has been proved. To obtain high speed and highly flexible beam steering, a two-axis acousto-optic deflector is employed. However, dispersion associated with acoustic-optic interaction will cause serious spatial deformation on the writing spot. The compensation for dispersion is proposed and studied. Experiments show promising results. An additional advantage of the proposed compensation method is that it can also precisely control the pulse number, and, hence improve the quality of ablation.

© Optical Society of America

OCIS Codes
(230.1040) Optical devices : Acousto-optical devices
(320.7160) Ultrafast optics : Ultrafast technology

ToC Category:
Research Papers

History
Original Manuscript: June 8, 2001
Published: August 13, 2001

Citation
B.K. Ann Ngoi, Krishnan Venkatakrishnan, L.E.N. Lim, and B. Tan, "Angular dispersion compensation for acousto-optic devices used for ultrashort-pulsed laser micromachining," Opt. Express 9, 200-206 (2001)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-9-4-200


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References

  1. X. Liu, D. Du. and G. Mourou, "Laser ablation and micromachining with ultrashort laser pulses," IEEE J. Quantum Electron. 33, 1706-1716, (1997). [CrossRef]
  2. P. P. Pronko, S. K. Dutta, J. Squier, J. V. Rudd, D. Du, and G. Mourou, "Machining of submicron holes using a femtosecond laser at 800nm," Opt. Commun. 114, 106-110 (1995). [CrossRef]
  3. X. Liu, "Submicron lines in thin metal films micromachined by an ultrafast laser oscillator," Conference on Lasers and Electro-Optics (CLEO/U.S.), Vol. 6 of 1998 OSA Technical Digest Series (Optical Society of America, Washington, D.C. 1998), p511.
  4. P. C. Allen and P. Buck, "Resolution performance of a 0.6NA, 364nm laser direct writer," Proc. SPIE, 1264, 454-465 (1990). [CrossRef]

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