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The con-focal method on verifying focal plane of MAS machine: erratum
Optics Express, Vol. 15, Issue 4, pp. 1954-1954 (2007)
http://dx.doi.org/10.1364/OE.15.001954
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Abstract
Correction to author listing and affiliations.
© 2007 Optical Society of America
The author listing and affiliations for the previous article [1] should read:
W. Huang and F. Cerrina, “The con-focal method on verifying focal plane of MAS machine,” Opt. Express 15,872–877 (2007). http://www.opticsinfobase.org/abstract.cfm?URI=oe-15-3-872 [CrossRef] [PubMed]
References and links
W. Huang and F. Cerrina, “The con-focal method on verifying focal plane of MAS machine,” Opt. Express 15,872–877 (2007). http://www.opticsinfobase.org/abstract.cfm?URI=oe-15-3-872 [CrossRef] [PubMed] |
OCIS Codes
(220.1140) Optical design and fabrication : Alignment
(220.3740) Optical design and fabrication : Lithography
ToC Category:
Errata
History
Original Manuscript: February 14, 2007
Manuscript Accepted: February 14, 2007
Published: February 19, 2007
Citation
Wei Huang and Franco Cerrina, "The con-focal method on verifying focal plane of MAS machine: erratum," Opt. Express 15, 1954-1954 (2007)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-15-4-1954
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