Study of silicon nanofibrous structure formed by femtosecond laser irradiation in air
Optics Express, Vol. 17, Issue 16, pp. 13869-13874 (2009)
http://dx.doi.org/10.1364/OE.17.013869
Acrobat PDF (393 KB)
Abstract
In this study, we report first time the effect of laser pulse repetition frequency and pulse width of femtosecond laser radiation on silicon nanofibrous structure formation under ambient condition. Surface nanotexture analysis revealed the changes in fibrous structure density and size in respect of laser pulse width and repetition frequency. A phonon confinement model is used to explain the Raman spectra of processed specimens in order to understand the structure details of nanofibrous structure and hence to support the surface nanotexture analysis. The present investigation leads to a conclusion that nanofibrous structure is formed due to the aggregation of silicon nanoparticles and their size is estimated using the confinement model which is in the order of few nanometers.
© 2009 Optical Society of America
1. Introduction
F. Djurabekova and K. Nordlund, “Atomistic simulation of the interface structure of Si nanocrystals embedded in amorphous silica,” Phys. Rev. B 77(11), 115325 (2008). [CrossRef]
S. Tiwari, F. Rana, H. Hanafi, A. Hartstein, E. F. Crabbé, and K. Chan, “A silicon nanocrystals based memory,” Appl. Phys. Lett. 68(10), 1377–1379 (1996). [CrossRef]
S. Prezioso, S. M. Hossain, A. Anopchenko, L. Pavesi, M. Wang, G. Pucker, and P. Bellutti, “Superlinear photovoltaic effect in Si nanocrystals based metal-insulator-semiconductor devices,” Appl. Phys. Lett. 94(6), 062108 (2009). [CrossRef]
T. Z. Lu, M. Alexe, R. Scholz, V. Talalaev, R. J. Zhang, and M. Zacharias, “Si nanocrystal based memories: Effect of the nanocrystal density,” J. Appl. Phys. 100(1), 014310 (2006). [CrossRef]
P. Alpuim, S. A. Filonovich, C. M. Costa, P. F. Rocha, M. I. Vasilevskiy, S. Lanceros-Mendez, C. Frias, A. T. Marques, R. Soares, and C. Costa, “Fabrication of a strain sensor for bone implant failure detection based on piezoresistive doped nanocrystalline silicon,” J. Non-Cryst. Solids 354(19–25), 2585–2589 (2008). [CrossRef]
I. Umezu, A. Sugimura, M. Inada, T. Makino, K. Matsumoto, and M. Takata, “Formation of nanoscale fine-structured silicon by pulsed laser ablation in hydrogen background gas,” Physical Review B 76, -(2007). [CrossRef]
B. R. Tull, J. E. Carey, E. Mazur, J. P. McDonald, and S. M. Yalisove, “Silicon surface morphologies after femtosecond laser irradiation,” MRS Bull. 31, 626–633 (2006). [CrossRef]
B. R. Tull, J. E. Carey, M. A. Sheehy, C. Friend, and E. Mazur, “Formation of silicon nanoparticles and web-like aggregates by femtosecond laser ablation in a background gas,” Applied Physics a-Materials Science & Processing 83, 341–346 (2006). [CrossRef]
B. Tan and K. Venkatakrishnan, “Synthesis of fibrous nanoparticle aggregates by femtosecond laser ablation in air,” Opt. Express 17(2), 1064–1069 (2009). [CrossRef] [PubMed]
S. T. Li, S. J. Silvers, and M. S. ElShall, “Surface oxidation and luminescence properties of weblike agglomeration of silicon nanocrystals produced by a laser vaporization-controlled condensation technique,” J. Phys. Chem. B 101(10), 1794–1802 (1997). [CrossRef]
H. Richter, Z. P. Wang, and L. Ley, “The one phonon Raman spectrum in microcrystalline silicon,” Solid State Commun. 39(5), 625–629 (1981). [CrossRef]
S. V. Zabotnov, L. A. Golovan’, I. A. Ostapenko, Y. V. Ryabchikov, A. V. Chervyakov, V. Y. Timoshenko, P. K. Kashkarov, and V. V. Yakovlev, “Femtosecond nanostructuring of silicon surfaces,” JETP Lett. 83(2), 69–71 (2006). [CrossRef]
J. Bonse, K. W. Brzezinka, and A. J. Meixner, “Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy,” Appl. Surf. Sci. 221(1–4), 215–230 (2004). [CrossRef]
R. Prabakaran, R. Kesavamoorthy, S. Amirthapandian, and A. Ramanand, “Raman scattering and photoluminescence studies on O+ implanted porous silicon,” Mater. Lett. 58(29), 3745–3750 (2004). [CrossRef]
2. Experiment
B. Tan and K. Venkatakrishnan, “Synthesis of fibrous nanoparticle aggregates by femtosecond laser ablation in air,” Opt. Express 17(2), 1064–1069 (2009). [CrossRef] [PubMed]
3. Results and discussion
B. Tan and K. Venkatakrishnan, “Synthesis of fibrous nanoparticle aggregates by femtosecond laser ablation in air,” Opt. Express 17(2), 1064–1069 (2009). [CrossRef] [PubMed]
B. Tan and K. Venkatakrishnan, “Synthesis of fibrous nanoparticle aggregates by femtosecond laser ablation in air,” Opt. Express 17(2), 1064–1069 (2009). [CrossRef] [PubMed]
A. Kailer, K. G. Nickel, and Y. G. Gogotsi, “Raman microspectroscopy of nanocrystalline and amorphous phases in hardness indentations,” Journal of Raman Spectroscopy 30(10), 939–937 (1999). [CrossRef]
Y. Kanemitsu, H. Uto, Y. Masumoto, T. Matsumoto, T. Futagi, and H. Mimura, “Microstructure and optical properties of free-standing porous silicon films: Size dependence of absorption spectra in Si nanometer-sized crystallites,” Phys. Rev. B 48(4), 2827–2830 (1993). [CrossRef]
I. De Wolf and H. E. Maes, “Mechanical stress measurements using micro-Raman spectroscopy,” Microsyst. Technol. 5(1), 13–17 (1998). [CrossRef]
I. De Wolf and H. E. Maes, “Mechanical stress measurements using micro-Raman spectroscopy,” Microsyst. Technol. 5(1), 13–17 (1998). [CrossRef]
I. H. Campbell and P. M. Fauchet, “The effects of microcrystal size and shape on the one phonon Raman spectra of crystalline semiconductors,” Solid State Commun. 58(10), 739–741 (1986). [CrossRef]
I. H. Campbell and P. M. Fauchet, “The effects of microcrystal size and shape on the one phonon Raman spectra of crystalline semiconductors,” Solid State Commun. 58(10), 739–741 (1986). [CrossRef]
B. Tan and K. Venkatakrishnan, “Synthesis of fibrous nanoparticle aggregates by femtosecond laser ablation in air,” Opt. Express 17(2), 1064–1069 (2009). [CrossRef] [PubMed]
I. H. Campbell and P. M. Fauchet, “The effects of microcrystal size and shape on the one phonon Raman spectra of crystalline semiconductors,” Solid State Commun. 58(10), 739–741 (1986). [CrossRef]
M. Yang, D. M. Huang, P. H. Hao, F. L. Zhang, X. Y. Hou, and Wang, “Study of the Raman Peak Shift and the Linewidth of Light-Emitting Porous Silicon,” J. Appl. Phys. 75(1), 651–653 (1994). [CrossRef]
4. Conclusions
Acknowledgement
References
F. Djurabekova and K. Nordlund, “Atomistic simulation of the interface structure of Si nanocrystals embedded in amorphous silica,” Phys. Rev. B 77(11), 115325 (2008). [CrossRef] | |
S. Tiwari, F. Rana, H. Hanafi, A. Hartstein, E. F. Crabbé, and K. Chan, “A silicon nanocrystals based memory,” Appl. Phys. Lett. 68(10), 1377–1379 (1996). [CrossRef] | |
S. Prezioso, S. M. Hossain, A. Anopchenko, L. Pavesi, M. Wang, G. Pucker, and P. Bellutti, “Superlinear photovoltaic effect in Si nanocrystals based metal-insulator-semiconductor devices,” Appl. Phys. Lett. 94(6), 062108 (2009). [CrossRef] | |
T. Z. Lu, M. Alexe, R. Scholz, V. Talalaev, R. J. Zhang, and M. Zacharias, “Si nanocrystal based memories: Effect of the nanocrystal density,” J. Appl. Phys. 100(1), 014310 (2006). [CrossRef] | |
P. Alpuim, S. A. Filonovich, C. M. Costa, P. F. Rocha, M. I. Vasilevskiy, S. Lanceros-Mendez, C. Frias, A. T. Marques, R. Soares, and C. Costa, “Fabrication of a strain sensor for bone implant failure detection based on piezoresistive doped nanocrystalline silicon,” J. Non-Cryst. Solids 354(19–25), 2585–2589 (2008). [CrossRef] | |
I. Umezu, A. Sugimura, M. Inada, T. Makino, K. Matsumoto, and M. Takata, “Formation of nanoscale fine-structured silicon by pulsed laser ablation in hydrogen background gas,” Physical Review B 76, -(2007). [CrossRef] | |
B. R. Tull, J. E. Carey, E. Mazur, J. P. McDonald, and S. M. Yalisove, “Silicon surface morphologies after femtosecond laser irradiation,” MRS Bull. 31, 626–633 (2006). [CrossRef] | |
S. V. Zabotnov, L. A. Golovan’, I. A. Ostapenko, Y. V. Ryabchikov, A. V. Chervyakov, V. Y. Timoshenko, P. K. Kashkarov, and V. V. Yakovlev, “Femtosecond nanostructuring of silicon surfaces,” JETP Lett. 83(2), 69–71 (2006). [CrossRef] | |
B. N. Chichkov, C. Momma, S. Nolte, F. vonAlvensleben, and A. Tunnermann, “Femtosecond, picosecond and nanosecond laser ablation of solids,” Applied Physics a-Materials Science & Processing 63, 109–115 (1996). [CrossRef] | |
B. R. Tull, J. E. Carey, M. A. Sheehy, C. Friend, and E. Mazur, “Formation of silicon nanoparticles and web-like aggregates by femtosecond laser ablation in a background gas,” Applied Physics a-Materials Science & Processing 83, 341–346 (2006). [CrossRef] | |
M. Y. Shen, C. H. Crouch, J. E. Carey, and E. Mazur, “Femtosecond laser-induced formation of submicrometer spikes on silicon in water,” Appl. Phys. Lett. 85(23), 5694–5696 (2004). [CrossRef] | |
M. A. Sheehy, L. Winston, J. E. Carey, C. M. Friend, and E. Mazur, “Role of the background gas in the morphology and optical properties of laser-microstructured silicon,” Chem. Mater. 17(14), 3582–3586 (2005).E [CrossRef] | |
B. Tan and K. Venkatakrishnan, “Synthesis of fibrous nanoparticle aggregates by femtosecond laser ablation in air,” Opt. Express 17(2), 1064–1069 (2009). [CrossRef] [PubMed] | |
S. T. Li, S. J. Silvers, and M. S. ElShall, “Surface oxidation and luminescence properties of weblike agglomeration of silicon nanocrystals produced by a laser vaporization-controlled condensation technique,” J. Phys. Chem. B 101(10), 1794–1802 (1997). [CrossRef] | |
S. Senadheera, B. Tan, and K. Venkatakrishnan, “Critical Time to Nucleation: Graphite and Silicon Nanoparticle Generation by Laser Ablation,” Journal of Nanotechnology 6(2009). | |
A. K. Arora, M. Rajalakshmi, and T. R. Ravindran, “Phonon Confinement in Nanostructured Materials,” Encyclopedia of Nanoscience and Nanotechnology 8, 499–512 (2004). | |
H. Richter, Z. P. Wang, and L. Ley, “The one phonon Raman spectrum in microcrystalline silicon,” Solid State Commun. 39(5), 625–629 (1981). [CrossRef] | |
J. Bonse, K. W. Brzezinka, and A. J. Meixner, “Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy,” Appl. Surf. Sci. 221(1–4), 215–230 (2004). [CrossRef] | |
R. Prabakaran, R. Kesavamoorthy, S. Amirthapandian, and A. Ramanand, “Raman scattering and photoluminescence studies on O+ implanted porous silicon,” Mater. Lett. 58(29), 3745–3750 (2004). [CrossRef] | |
A. Kailer, K. G. Nickel, and Y. G. Gogotsi, “Raman microspectroscopy of nanocrystalline and amorphous phases in hardness indentations,” Journal of Raman Spectroscopy 30(10), 939–937 (1999). [CrossRef] | |
Y. Kanemitsu, H. Uto, Y. Masumoto, T. Matsumoto, T. Futagi, and H. Mimura, “Microstructure and optical properties of free-standing porous silicon films: Size dependence of absorption spectra in Si nanometer-sized crystallites,” Phys. Rev. B 48(4), 2827–2830 (1993). [CrossRef] | |
I. De Wolf and H. E. Maes, “Mechanical stress measurements using micro-Raman spectroscopy,” Microsyst. Technol. 5(1), 13–17 (1998). [CrossRef] | |
I. H. Campbell and P. M. Fauchet, “The effects of microcrystal size and shape on the one phonon Raman spectra of crystalline semiconductors,” Solid State Commun. 58(10), 739–741 (1986). [CrossRef] | |
M. Yang, D. M. Huang, P. H. Hao, F. L. Zhang, X. Y. Hou, and Wang, “Study of the Raman Peak Shift and the Linewidth of Light-Emitting Porous Silicon,” J. Appl. Phys. 75(1), 651–653 (1994). [CrossRef] |
OCIS Codes
(140.3390) Lasers and laser optics : Laser materials processing
(160.6000) Materials : Semiconductor materials
(160.4236) Materials : Nanomaterials
ToC Category:
Lasers and Laser Optics
History
Original Manuscript: May 13, 2009
Revised Manuscript: July 8, 2009
Manuscript Accepted: July 15, 2009
Published: July 27, 2009
Citation
Sivakumar Manickam, Krishnan Venkatakrishnan, Bo Tan, and Venkat Venkataramanan, "Study of silicon nanofibrous structure formed by femtosecond laser irradiation in air," Opt. Express 17, 13869-13874 (2009)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-17-16-13869
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References
- F. Djurabekova, and K. Nordlund, "Atomistic simulation of the interface structure of Si nanocrystals embedded in amorphous silica," Phys. Rev. B 77(11), 115325 (2008). [CrossRef]
- S. Tiwari, F. Rana, H. Hanafi, A. Hartstein, E. F. Crabbé, and K. Chan, "A silicon nanocrystals based memory," Appl. Phys. Lett. 68(10), 1377-1379 (1996). [CrossRef]
- S. Prezioso, S. M. Hossain, A. Anopchenko, L. Pavesi, M. Wang, G. Pucker, and P. Bellutti, "Superlinear photovoltaic effect in Si nanocrystals based metal-insulator-semiconductor devices," Appl. Phys. Lett. 94(6), 062108 (2009). [CrossRef]
- T. Z. Lu, M. Alexe, R. Scholz, V. Talalaev, R. J. Zhang, and M. Zacharias, "Si nanocrystal based memories: Effect of the nanocrystal density," J. Appl. Phys. 100(1), 014310 (2006). [CrossRef]
- P. Alpuim, S. A. Filonovich, C. M. Costa, P. F. Rocha, M. I. Vasilevskiy, S. Lanceros-Mendez, C. Frias, A. T. Marques, R. Soares, and C. Costa, "Fabrication of a strain sensor for bone implant failure detection based on piezoresistive doped nanocrystalline silicon," J. Non-Cryst. Solids 354(19-25), 2585-2589 (2008). [CrossRef]
- I. Umezu, A. Sugimura, M. Inada, T. Makino, K. Matsumoto, and M. Takata, "Formation of nanoscale fine-structured silicon by pulsed laser ablation in hydrogen background gas," Physical Review B 76, - (2007). [CrossRef]
- B. R. Tull, J. E. Carey, E. Mazur, J. P. McDonald, and S. M. Yalisove, "Silicon surface morphologies after femtosecond laser irradiation," MRS Bull. 31, 626-633 (2006). [CrossRef]
- S. V. Zabotnov, L. A. Golovan’, I. A. Ostapenko, Y. V. Ryabchikov, A. V. Chervyakov, V. Y. Timoshenko, P. K. Kashkarov, and V. V. Yakovlev, "Femtosecond nanostructuring of silicon surfaces," JETP Lett. 83(2), 69-71 (2006). [CrossRef]
- B. N. Chichkov, C. Momma, S. Nolte, F. vonAlvensleben, and A. Tunnermann, "Femtosecond, picosecond and nanosecond laser ablation of solids," Applied Physics a-Materials Science & Processing 63, 109-115 (1996). [CrossRef]
- B. R. Tull, J. E. Carey, M. A. Sheehy, C. Friend, and E. Mazur, "Formation of silicon nanoparticles and web-like aggregates by femtosecond laser ablation in a background gas," Applied Physics a-Materials Science & Processing 83, 341-346 (2006). [CrossRef]
- M. Y. Shen, C. H. Crouch, J. E. Carey, and E. Mazur, "Femtosecond laser-induced formation of submicrometer spikes on silicon in water," Appl. Phys. Lett. 85(23), 5694-5696 (2004). [CrossRef]
- M. A. Sheehy, L. Winston, J. E. Carey, C. M. Friend, and E. Mazur, "Role of the background gas in the morphology and optical properties of laser-microstructured silicon," Chem. Mater. 17(14), 3582-3586 (2005).E [CrossRef]
- B. Tan, and K. Venkatakrishnan, "Synthesis of fibrous nanoparticle aggregates by femtosecond laser ablation in air," Opt. Express 17(2), 1064-1069 (2009). [CrossRef] [PubMed]
- S. T. Li, S. J. Silvers, and M. S. ElShall, "Surface oxidation and luminescence properties of weblike agglomeration of silicon nanocrystals produced by a laser vaporization-controlled condensation technique," J. Phys. Chem. B 101(10), 1794-1802 (1997). [CrossRef]
- S. Senadheera, B. Tan, and K. Venkatakrishnan, "Critical Time to Nucleation: Graphite and Silicon Nanoparticle Generation by Laser Ablation," Journal of Nanotechnology 6(2009).
- K. Arora, M. Rajalakshmi, and T. R. Ravindran, "Phonon Confinement in Nanostructured Materials," Encyclopedia of Nanoscience and Nanotechnology 8, 499-512 (2004).
- H. Richter, Z. P. Wang, and L. Ley, "The one phonon Raman spectrum in microcrystalline silicon," Solid State Commun. 39(5), 625-629 (1981). [CrossRef]
- J. Bonse, K. W. Brzezinka, and A. J. Meixner, "Modifying single-crystalline silicon by femtosecond laser pulses: an analysis by micro Raman spectroscopy, scanning laser microscopy and atomic force microscopy," Appl. Surf. Sci. 221(1-4), 215-230 (2004). [CrossRef]
- R. Prabakaran, R. Kesavamoorthy, S. Amirthapandian, and A. Ramanand, "Raman scattering and photoluminescence studies on O+ implanted porous silicon," Mater. Lett. 58(29), 3745-3750 (2004). [CrossRef]
- Kailer, K. G. Nickel, and Y. G. Gogotsi, "Raman microspectroscopy of nanocrystalline and amorphous phases in hardness indentations," Journal of Raman Spectroscopy 30(10), 939-937 (1999). [CrossRef]
- Y. Kanemitsu, H. Uto, Y. Masumoto, T. Matsumoto, T. Futagi, and H. Mimura, "Microstructure and optical properties of free-standing porous silicon films: Size dependence of absorption spectra in Si nanometer-sized crystallites," Phys. Rev. B 48(4), 2827-2830 (1993). [CrossRef]
- De Wolf, and H. E. Maes, "Mechanical stress measurements using micro-Raman spectroscopy," Microsyst. Technol. 5(1), 13-17 (1998). [CrossRef]
- H. Campbell, and P. M. Fauchet, "The effects of microcrystal size and shape on the one phonon Raman spectra of crystalline semiconductors," Solid State Commun. 58(10), 739-741 (1986). [CrossRef]
- M. Yang, D. M. Huang, P. H. Hao, F. L. Zhang, X. Y. Hou, and X. Wang, "Study of the Raman Peak Shift and the Linewidth of Light-Emitting Porous Silicon," J. Appl. Phys. 75(1), 651-653 (1994). [CrossRef]
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