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Optics Express

  • Editor: C. Martijn de Sterke
  • Vol. 19, Iss. 23 — Nov. 7, 2011
  • pp: 22462–22469

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One-step integration of metal nanoparticle in photonic crystal nanobeam cavity

Ishita Mukherjee, Ghazal Hajisalem,, and Reuven Gordon  »View Author Affiliations


Optics Express, Vol. 19, Issue 23, pp. 22462-22469 (2011)
http://dx.doi.org/10.1364/OE.19.022462


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Abstract

A single step process of integrating a resonantly tuned silver nanoparticle into photonic crystal nanobeam cavities fabricated by focused ion beam milling is presented. Even though the quality factor of the cavities is reduced by a factor of 20, the emission peak at the cavity resonance is enhanced by 5-fold with respect to the cavities without the metal nanoparticle. The fluorescence is also compared before and after etching away the nanoparticle. Experimental quality factors and wavelength shifts are found to agree reasonably well with simulation values. These results are promising for future single photon emission studies involving the incorporation of quantum dot or NV center emitters into hybrid plasmonic/photonic crystal cavities for enhanced emission rates while retaining reasonably high quality factors.

© 2011 OSA

1. Introduction

Cavity quantum electrodynamics allows for enhancing the emission efficiency of single photon sources by increasing the local density of optical states (LDOS). For example, it has been shown that with a photonic crystal nanocavity, it is possible to control the spontaneous emission rates from directly coupled quantum dots [1

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoglu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308(5725), 1158–1161 (2005). [CrossRef] [PubMed]

–3

P. Lodahl, F. van Driel, I. S. Nikolaev, A. Irman, K. Overgaag, D. Vanmaekelbergh, and W. L. Vos, “Controlling the dynamics of spontaneous emission from quantum dots by photonic crystals,” Nature 430(7000), 654–657 (2004). [CrossRef] [PubMed]

]. Photonic crystals suppress radiation by creating bandgaps in the radiation zone. The smallest possible mode volume attainable by a dielectric cavity, however, is on the order of the wavelength cubed in the material [4

H. Ryu, M. Notomi, and Y. Lee, “High-quality-factor and small-mode-volume hexapole modes in photonic-crystal-slab nanocavities,” Appl. Phys. Lett. 83(21), 4294 (2003). [CrossRef]

,5

S. A. Maier, “Effective mode volume of nanoscale plasmon cavities,” Opt. Quantum Electron. 38(1-3), 257–267 (2006). [CrossRef]

], and this poses a limit to the Purcell enhancement factor.

Metal nanostructures allow for much smaller mode volumes, well below the conventional diffraction limit, due to plasmonic effects [6

S. A. Maier, “Plasmonics: metal nanostructures for subwavelength photonic devices,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1214–1220 (2006). [CrossRef]

–9

J. A. Schuller, E. S. Barnard, W. Cai, Y. C. Jun, J. S. White, and M. L. Brongersma, “Plasmonics for extreme light concentration and manipulation,” Nat. Mater. 9(3), 193–204 (2010). [CrossRef] [PubMed]

]. The near-field plasmonic confinement allows for small mode volumes to enhanced light-matter interaction, for example, for single photon sources [10

A. L. Falk, F. H. L. Koppens, C. L. Yu, K. Kang, N. de Leon Snapp, A. V. Akimov, M. Jo, M. D. Lukin, and H. Park, “Near-field electrical detection of optical plasmons and single-plasmon sources,” Nat. Phys. 5(7), 475–479 (2009). [CrossRef]

,11

C. Grillet, C. Monat, C. L. Smith, B. J. Eggleton, D. J. Moss, S. Frédérick, D. Dalacu, P. J. Poole, J. Lapointe, G. Aers, and R. L. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15(3), 1267–1276 (2007). [CrossRef] [PubMed]

]. With metal nanostructures, however, ohmic losses and increased radiation reduce the quality factors to large extent [6

S. A. Maier, “Plasmonics: metal nanostructures for subwavelength photonic devices,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1214–1220 (2006). [CrossRef]

,12

B. Min, E. Ostby, V. Sorger, E. Ulin-Avila, L. Yang, X. Zhang, and K. Vahala, “High-Q surface-plasmon-polariton whispering-gallery microcavity,” Nature 457(7228), 455–458 (2009). [CrossRef] [PubMed]

,13

C. G. Biris and N. C. Panoiu, “Nonlinear pulsed excitation of high-Q optical modes of plasmonic nanocavities,” Opt. Express 18(16), 17165–17179 (2010). [CrossRef] [PubMed]

].

Recent works have suggested combining dielectric microcavities and plasmonic particles to obtain the benefit of reducing the mode volume while retaining some of the benefit of low loss in microcavities [14

M. K. Kim, S. H. Lee, M. Choi, B. H. Ahn, N. Park, Y. H. Lee, and B. Min, “Low-loss surface-plasmonic nanobeam cavities,” Opt. Express 18(11), 11089–11096 (2010). [CrossRef] [PubMed]

–17

P. E. Barclay, K. M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17(12), 9588–9601 (2009). [CrossRef] [PubMed]

]. Obviously, the introduction of plasmonic structures will introduce losses in such a configuration; however, it is expected that the overall performance for many applications can see a net improvement from the hybrid approach [17

P. E. Barclay, K. M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17(12), 9588–9601 (2009). [CrossRef] [PubMed]

,18

I. S. Maksymov, “Optical switching and logic gates with hybrid plasmonic-photonic crystal nanobeam cavities,” Phys. Lett. A 375(5), 918–921 (2011). [CrossRef]

]. Intuitively, this net improvement comes from combining the metal nanostructure and a photonic crystal to control simultaneously the near-field and the radiation zones.

The aim of this work is to explore hybrid plasmonic/photonic crystal integration strategies that allow for enhanced emission, while retaining reasonably large quality factors. Here we demonstrate the facile integration of a frequency-tuned metal nanostructure into a photonic crystal cavity. We evaluate the performance, considering the enhanced fluorescence and the accompanied increase in the linewidth, for this integration approach. This represents an important step on the path towards the ultimate integration of the hybrid plasmonic/photonic crystal cavity with quantum emitters.

The combination of photonic crystals with metal nanostructures (and ultimately quantum emitters as well), however, introduces fabrication challenges, in particular, registration between the cavity and the metal nanostructure. Multi-step processes are possible, for example, multistage electron beam lithography, deposition/lift-off and etching, or alternatively combining electron beam lithography with dip-pen techniques [15

M. Barth, S. Schietinger, S. Fischer, J. Becker, N. Nüsse, T. Aichele, B. Löchel, C. Sönnichsen, and O. Benson, “Nanoassembled plasmonic-photonic hybrid cavity for tailored light-matter coupling,” Nano Lett. 10(3), 891–895 (2010). [CrossRef] [PubMed]

, 19

S. M. Kim, W. Zhang, and B. T. Cunningham, “Coupling discrete metal nanoparticles to photonic crystal surface resonant modes and application to Raman spectroscopy,” Opt. Express 18(5), 4300–4309 (2010). [CrossRef] [PubMed]

, 20

F. De Angelis, M. Patrini, G. Das, I. Maksymov, M. Galli, L. Businaro, L. C. Andreani, and E. Di Fabrizio, “A hybrid plasmonic-photonic nanodevice for label-free detection of a few molecules,” Nano Lett. 8(8), 2321–2327 (2008). [CrossRef] [PubMed]

]. Here we present a one-step fabrication and integration strategy using focused ion beam (FIB) milling. Photonic crystal nanobeam cavities, shown to have much higher experimental quality factors in Si3N4 (Q ~55,000) [21

M. Khan, T. Babinec, M. W. McCutcheon, P. Deotare, and M. Loncar, “Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities,” Opt. Lett. 36(3), 421–423 (2011). [CrossRef] [PubMed]

], were chosen for fabrication over L3 (Q ~1500) [22

M. Barth, J. Kouba, J. Stingl, B. Löchel, and O. Benson, “Modification of visible spontaneous emission with silicon nitride photonic crystal nanocavities,” Opt. Express 15(25), 17231–17240 (2007). [CrossRef] [PubMed]

] and double heterostructure photonic cavities (Q ~3400) [23

M. Barth, N. Nusse, J. Stingl, B. Lochel, and O. Benson, “Emission properties of high Q silicon nitride photonic crystal heterostructure cavities,” Appl. Phys. Lett. 93(2), 021112 (2008). [CrossRef]

]. A single silver nanoparticle (tuned to 600 nm) has been incorporated in the center of the cavity. Silver nanoparticles were chosen because of their lower losses (as compared, for example, to gold) and the ability to tune their resonance by systematic colloidal synthesis. Fluorescence spectroscopy of the as-fabricated hybrid structure shows five-fold increased emission and a 0.5 nm increase in the linewidth. While the bare photonic cavity measurements were limited by the spectrometer resolution (~0.07 nm), the quality factor of the integrated structure is estimated to be ~1200.

2. Design of the hybrid photonic crystal nanobeam / silver nanoparticle structure

Photonic crystal nanobeam cavities have been theoretically proven to give quality factors of the order of a million while supporting a single resonance mode at 637 nm [24

M. W. McCutcheon and M. Loncar, “Design of a silicon nitride photonic crystal nanocavity with a Quality factor of one million for coupling to a diamond nanocrystal,” Opt. Express 16(23), 19136–19145 (2008). [CrossRef] [PubMed]

].We scaled those past designs to shift the cavity resonance to 600 nm. Figure 1 shows a schematic of the Si3N4 beam photonic cavity. The Bragg mirrors with a = 225 nm and r = 63 nm were tapered down along four holes symmetrically around the center to a1 = 184.5 nm and r1 = 49.5 nm. A single silver ellipsoid nanoparticle (50 nm by 30 nm by 5 nm principle axes) with extinction peak close to the operating wavelength of the cavity (610 nm) is placed at the center to show the configuration of our final assembly.

Fig. 1 Schematic showing the arrangement of the hole radii and periodicities for a four-hole taper beam photonic cavity with the desired location of the metal nanoparticle.

A finite-difference time-domain (Lumerical FDTD Solutions 7.5) simulation with perfectly matched layer (PML) boundary conditions was first performed on the cavity (n=2.04) depicted in Fig. 1 without the metal particle. To allow uniformity in meshing the structure, the mesh size in x, y and z directions were chosen such that they were exact submultiples of the simulation volume in the respective directions. The structure was excited with a z-polarized magnetic dipole located slightly away from the center of the cavity (offset by 50 nm in x and y) to break the symmetry.

In high quality photonic cavities, long simulations are required to allow the field to decay to zero. Therefore, we calculate the quality instead from cavity ringdown after allowing the simulation to run for 10 hours (corresponding to 1.5 ps in the simulation time) [25

T. Tanabe, A. Shinya, E. Kuramochi, S. Kondo, H. Taniyama, and M. Notomi, “Single point defect photonic crystal nanocavity with ultra high quality factor achieved by using hexapole mode,” Appl. Phys. Lett. 91(2), 021110 (2007). [CrossRef]

]. The simulation results confirmed the presence of a single cavity resonance mode at 602.24 nm (determined by Fourier transform) for the bare cavity and the quality factor calculated using the above method was found to be ~65,000. The simulations were repeated with a cavity with the nanoparticle. Adding the nanoparticle (meshed with a 2 nm mesh in all directions) resulted in a quality factor of ~1800 at a wavelength of 611.14 nm.

Figure 2 shows the electric field intensity distribution 5 nm above the nanobeam (cutting through the middle of the nanoparticle) without and with the nanoparticle, using a logarithmic (base 10) scale. The cavity with the nanoparticle has 4.5 times higher maximum local field intensity.

Fig. 2 (a) Electric field distribution 5 nm above the nanobeam without the Ag nanoparticle at 602.24 nm (logscale). (b) Electric field distribution inside the cavity with the nanoparticle at 611.14 nm (logscale).

3. Nanoparticle synthesis

Ag. nanoparticles with a resonance around 600 nm were synthesized using photoinduced colloidal assembly [26

R. Jin, Y. Cao, C. A. Mirkin, K. L. Kelly, G. C. Schatz, and J. G. Zheng, “Photoinduced conversion of silver nanospheres to nanoprisms,” Science 294(5548), 1901–1903 (2001). [CrossRef] [PubMed]

]. Spherical silver nanospheres were formed by the reaction between NaBH4 and AgNO3 in solution in presence of trisodium citrate. The solution contain Ag spheres was mixed with a particle stabilizing agent (BSPP solution) and irradiated with a 60W white halogen light for 24 hours. This produced mostly ellipsoidal nanoparticles with an extinction peak at 610 nm. For longer exposure times that all the Ag particles evolve into nanoprisms with a peak in extinction at 670 nm, a small portion of them grow in to prisms much before that. For instance, some of the silver particles in the suspension that showed extinction at 610 nm were found to be prism shaped.

Figure 3(a) shows the scanning electron microscope (SEM) image of an ellipsoidal silver nanoparticle on Si3N4 membrane while 3(b) shows a fully formed silver nanoprism (on gold surface). Figure 3(c) depicts the extinction spectrum of the controlled-growth silver nanoparticles suspended in water with a peak at a wavelength of 610 nm.

Fig. 3 (a) Silver particle after 24 hours of irradiation showed on Si3N4 (b) silver prism after 72 hours of irradiation showed on gold (c) Extinction spectrum of aqueous suspension of silver nanoparticles synthesized in our lab, showing a peak at 610 nm.

4. Fabrication procedure

The silver nanoparticle solution was diluted by 20 times with deionized water and drop coated on a 9 × 9 grid comprising of 100 μm × 100 μm Si3N4 windows, each 200 nm thick (Ted Pella Inc.). The solution was allowed to dry and the sample allowed to rest overnight in the evacuated FIB (Hitachi FB 2100) chamber. A secondary ion image detected the presence of silver particles on the surface of Si3N4 with a distribution of approximately 5-6 particles per 25 μm2. To realize the structure without the nanoparticle, a spot was chosen such that any silver particles would lie in the region to be milled away by the beam. Gallium ions accelerated at 40 keV with a beam current of 10 pA and spot size of ~13.8 nm were at first used to drill the holes. The adjacent 2 µm wide cavities were then rough-cut using another beam (spot size ~21.7 nm) with the same acceleration voltage but a beam current of 70 pA. Finally, the cavity edges were reshaped for 70 minutes with the same beam used to drill the holes. Figure 4 shows a SEM image of one such cavity.

Fig. 4 SEM image of a FIB fabricated photonic crystal nanobeam cavity on Si3N4. (Inset) Photonic crystal nanobeam cavity showing an ellipsoid nanoparticle at the center.

To realize a photonic cavity with the nanoparticle in it, the area was scanned to identify a single silver particle in isolation. The milling patterns were placed so that the center of the silver particle coincided (to within 10 nm) with the center of the nanobeam in between its two smallest holes and is oriented transverse to the beam, see Fig. 2(b). After taking care that any other silver particles in the vicinity of the one selected would be milled away, the cavity was milled as before. In total, 20 cavities were fabricated, 10 with and 10 without the nanoparticles. Energy dispersive x-ray spectroscopy (Bruker Quantax EDS) was performed later on the beam containing the silver particle and it confirmed the presence of silver nanoparticle after milling. Figure 4 (inset) shows the SEM image of a fabricated photonic crystal nanobeam cavity containing a nanoparticle.

5. Fluorescence measurements

The fabricated beam cavities were characterized using fluorescence microscopy. Both types of cavities were excited with ~875µW of power from a 514 nm Argon ion laser. The results required focusing on the center of the cavity, as shown in Fig. 5 . Focusing away from the center gave negligible fluorescence. The laser was focused to the spot that gave the largest intensity in each case. Fluorescence from Si3N4 emitted out of the plane from the membrane was collected using a 100× /0.9 NA microscope objective for 5 accumulations each with 10 seconds exposure time (to increase the SNR). It was measured with a 0.25 m Czerney Turner spectrometer containing an 1800 lines/mm grating and using a Peltier cooled CCD.

Fig. 5 Schematic showing the fluorescence microscopy setup and the actual laser spot focused at the center of one of the characterized nanobeams.(Inset) Schematic of the laser spot focused off-center on the nanobeam.

Figures 6(a) and 6(b) show the fluorescence emission for cavities without the Ag nanoparticle. In Fig. 6(a), a scan over a range of 580 nm to 660 nm shows a single sharp peak for the bare cavity at 590 nm over a broad background. In Fig. 6(b), a Lorentzian curve fit on the peak data points shows an FWHM (Δλ) of 0.1 nm. Unfortunately, our spectrometer resolution is 0.07 nm, so that the quality factor of the highest quality cavities, with a linewidth of 0.1 nm could not be determined accurately. We used Lorentzian fitting and deconvolution [27

G. Hernandez, “Analytical description of a Fabry-Perot photoelectric spectrometer,” Appl. Opt. 5(11), 1745–1748 (1966). [CrossRef] [PubMed]

] to estimate the quality factor to be 20,000 ± 3,000, which is below the value of 55,000 that has been found in other experiments [21

M. Khan, T. Babinec, M. W. McCutcheon, P. Deotare, and M. Loncar, “Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities,” Opt. Lett. 36(3), 421–423 (2011). [CrossRef] [PubMed]

].

Fig. 6 (a)Fluorescence emission spectrum and (b) Lorentzian fit on cavities without nanoparticle (blue). (c) Fluorescence emission spectrum and (d) Lorentzian fit on cavities with nanoparticle (red). Data points are shown in black. (e) Linewidth and wavelength of the fabricated cavities without (blue) and with (red) the nanoparticle. (f) Net intensity counts (peak count-average background count) achieved from the cavities at various resonance wavelengths.

Figures 6(c) and 6(d) show the fluorescence emission for cavities with the Ag nanoparticle. Figure 6(c) shows a single peak at 597.5 nm with 5 times higher intensity counts than Fig. 6(a). The enhancement factor was determined by taking ratio of the peak heights, subtracting the background and for the same excitation intensity. The background was typically the same in both cases (with and without the particle), and the peak height and the background both scaled linearly with the excitation laser power (in the low power excitation regime). Fitting Fig. 6(d) to a Lorentzian, the peak data points are found to show a Δλ of 0.5 nm so that the quality factor is estimated to be 1200.

In total, 10 cavities without the nanoparticles were fabricated and their reproducibility tested, as shown in Figs. 6(e) and 6(f). To ensure reproducibility, the cavities were characterized on multiple days. Figure 6(f) shows that the cavities without Ag nanoparticles had approximately the same peak height for all 10 cavities fabricated (blue squares).

For the cavities with the nanoparticles, the wider FWHM is expected to arise from a combination of enhanced radiative coupling and increased losses due to the presence of the Ag nanoparticle. Similarly, the enhanced fluorescence intensity is attributable to the enhanced radiative coupling, as well as the enhanced local density of photonic states allowed for by the metal nanoparticle. Separation of the radiative contributions from the local field effects requires further studies, for example, by noting relative changes in emission lifetime and emission intensity.

6. Measurements on a single cavity with and without the Ag nanoparticle

It should be noted that it is not strictly valid to compare different cavities with one another, even though they were fabricated with nominally the same procedure. Therefore, we took the cavity with the highest enhancement and etched away the Ag nanoparticle with 7M nitric acid for 5 min (typical etch rate of 400 nm/min at 20°C) [28

L. L. Martínez, M. Segarra, M. Fernandez, and F. Espiell, “Kineteics of the dissolution of pure silver and silver-gold alloys in nitric acid solutions,” Metal. Trans. B 24(5), 827–837 (1993). [CrossRef]

,29

M. E. Grass, Y. Yue, S. E. Habas, R. M. Rioux, C. I. Teall, P. Yang, and G. A. Somorjai, “Silver ion mediated shape control of platinum nanoparticles: removal of silver by selective etching leads to increased catalytic activity,” J. Phys. Chem. C 112(13), 4797–4804 (2008). [CrossRef]

]. Figure 7 shows a blue-shift of 4 nm and reduction in the peak height (by 5 times) when removing the nanoparticle. This result is consistent with both the simulations (in terms of the wavelength shift) and the above measurements on multiple cavities (in terms of the enhancement factor).

Fig. 7 Measurements taken from the same cavity before (red) and after (blue) the removal of the nanoparticle. (Inset) Zoom in on the blue curve showing the decreased intensity counts and linewidth compared to the red.

7. Conclusion

We have demonstrated a one-step fabrication process for the integration of size-controlled resonant Ag nanoparticles within a suspended Si3N4 nanobeam photonic crystal cavity. The emission wavelength was close to the designed value. The estimated quality factor of the cavity with the Ag nanoparticle is 1200 with enhanced radiative coupling, which suggests that these measurements are promising for future single photon emission studies incorporating quantum dot or NV center emitters [17

P. E. Barclay, K. M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17(12), 9588–9601 (2009). [CrossRef] [PubMed]

, 30

P. E. Barclay, C. Santori, K. M. Fu, R. G. Beausoleil, and O. Painter, “Coherent interference effects in a nano-assembled diamond NV center cavity-QED system,” Opt. Express 17(10), 8081–8097 (2009). [CrossRef] [PubMed]

].

Acknowledgments

This work is supported by the British Columbia Innovation Council NRAS grant.

References

1.

A. Badolato, K. Hennessy, M. Atatüre, J. Dreiser, E. Hu, P. M. Petroff, and A. Imamoglu, “Deterministic coupling of single quantum dots to single nanocavity modes,” Science 308(5725), 1158–1161 (2005). [CrossRef] [PubMed]

2.

D. Englund, D. Fattal, E. Waks, G. Solomon, B. Zhang, T. Nakaoka, Y. Arakawa, Y. Yamamoto, and J. Vucković, “Controlling the spontaneous emission rate of single quantum dots in a two-dimensional photonic crystal,” Phys. Rev. Lett. 95(1), 013904 (2005). [CrossRef] [PubMed]

3.

P. Lodahl, F. van Driel, I. S. Nikolaev, A. Irman, K. Overgaag, D. Vanmaekelbergh, and W. L. Vos, “Controlling the dynamics of spontaneous emission from quantum dots by photonic crystals,” Nature 430(7000), 654–657 (2004). [CrossRef] [PubMed]

4.

H. Ryu, M. Notomi, and Y. Lee, “High-quality-factor and small-mode-volume hexapole modes in photonic-crystal-slab nanocavities,” Appl. Phys. Lett. 83(21), 4294 (2003). [CrossRef]

5.

S. A. Maier, “Effective mode volume of nanoscale plasmon cavities,” Opt. Quantum Electron. 38(1-3), 257–267 (2006). [CrossRef]

6.

S. A. Maier, “Plasmonics: metal nanostructures for subwavelength photonic devices,” IEEE J. Sel. Top. Quantum Electron. 12(6), 1214–1220 (2006). [CrossRef]

7.

S. A. Maier and H. A. Atwater, “Plasmonics: Localization and guiding of electromagnetic energy in metal/dielectric structures,” J. Appl. Phys. 98(1), 011101 (2005). [CrossRef]

8.

E. Ozbay, “Plasmonics: merging photonics and electronics at nanoscale dimensions,” Science 311(5758), 189–193 (2006). [CrossRef] [PubMed]

9.

J. A. Schuller, E. S. Barnard, W. Cai, Y. C. Jun, J. S. White, and M. L. Brongersma, “Plasmonics for extreme light concentration and manipulation,” Nat. Mater. 9(3), 193–204 (2010). [CrossRef] [PubMed]

10.

A. L. Falk, F. H. L. Koppens, C. L. Yu, K. Kang, N. de Leon Snapp, A. V. Akimov, M. Jo, M. D. Lukin, and H. Park, “Near-field electrical detection of optical plasmons and single-plasmon sources,” Nat. Phys. 5(7), 475–479 (2009). [CrossRef]

11.

C. Grillet, C. Monat, C. L. Smith, B. J. Eggleton, D. J. Moss, S. Frédérick, D. Dalacu, P. J. Poole, J. Lapointe, G. Aers, and R. L. Williams, “Nanowire coupling to photonic crystal nanocavities for single photon sources,” Opt. Express 15(3), 1267–1276 (2007). [CrossRef] [PubMed]

12.

B. Min, E. Ostby, V. Sorger, E. Ulin-Avila, L. Yang, X. Zhang, and K. Vahala, “High-Q surface-plasmon-polariton whispering-gallery microcavity,” Nature 457(7228), 455–458 (2009). [CrossRef] [PubMed]

13.

C. G. Biris and N. C. Panoiu, “Nonlinear pulsed excitation of high-Q optical modes of plasmonic nanocavities,” Opt. Express 18(16), 17165–17179 (2010). [CrossRef] [PubMed]

14.

M. K. Kim, S. H. Lee, M. Choi, B. H. Ahn, N. Park, Y. H. Lee, and B. Min, “Low-loss surface-plasmonic nanobeam cavities,” Opt. Express 18(11), 11089–11096 (2010). [CrossRef] [PubMed]

15.

M. Barth, S. Schietinger, S. Fischer, J. Becker, N. Nüsse, T. Aichele, B. Löchel, C. Sönnichsen, and O. Benson, “Nanoassembled plasmonic-photonic hybrid cavity for tailored light-matter coupling,” Nano Lett. 10(3), 891–895 (2010). [CrossRef] [PubMed]

16.

P. E. Barclay, K. Srinivasan, and O. Painter, “Design of photonic crystal waveguides for evanescent coupling to optical fiber tapers and integration with high-Q cavities,” J. Opt. Soc. Am. 20(11), 2274–2284 (2003). [CrossRef]

17.

P. E. Barclay, K. M. Fu, C. Santori, and R. G. Beausoleil, “Hybrid photonic crystal cavity and waveguide for coupling to diamond NV-centers,” Opt. Express 17(12), 9588–9601 (2009). [CrossRef] [PubMed]

18.

I. S. Maksymov, “Optical switching and logic gates with hybrid plasmonic-photonic crystal nanobeam cavities,” Phys. Lett. A 375(5), 918–921 (2011). [CrossRef]

19.

S. M. Kim, W. Zhang, and B. T. Cunningham, “Coupling discrete metal nanoparticles to photonic crystal surface resonant modes and application to Raman spectroscopy,” Opt. Express 18(5), 4300–4309 (2010). [CrossRef] [PubMed]

20.

F. De Angelis, M. Patrini, G. Das, I. Maksymov, M. Galli, L. Businaro, L. C. Andreani, and E. Di Fabrizio, “A hybrid plasmonic-photonic nanodevice for label-free detection of a few molecules,” Nano Lett. 8(8), 2321–2327 (2008). [CrossRef] [PubMed]

21.

M. Khan, T. Babinec, M. W. McCutcheon, P. Deotare, and M. Loncar, “Fabrication and characterization of high-quality-factor silicon nitride nanobeam cavities,” Opt. Lett. 36(3), 421–423 (2011). [CrossRef] [PubMed]

22.

M. Barth, J. Kouba, J. Stingl, B. Löchel, and O. Benson, “Modification of visible spontaneous emission with silicon nitride photonic crystal nanocavities,” Opt. Express 15(25), 17231–17240 (2007). [CrossRef] [PubMed]

23.

M. Barth, N. Nusse, J. Stingl, B. Lochel, and O. Benson, “Emission properties of high Q silicon nitride photonic crystal heterostructure cavities,” Appl. Phys. Lett. 93(2), 021112 (2008). [CrossRef]

24.

M. W. McCutcheon and M. Loncar, “Design of a silicon nitride photonic crystal nanocavity with a Quality factor of one million for coupling to a diamond nanocrystal,” Opt. Express 16(23), 19136–19145 (2008). [CrossRef] [PubMed]

25.

T. Tanabe, A. Shinya, E. Kuramochi, S. Kondo, H. Taniyama, and M. Notomi, “Single point defect photonic crystal nanocavity with ultra high quality factor achieved by using hexapole mode,” Appl. Phys. Lett. 91(2), 021110 (2007). [CrossRef]

26.

R. Jin, Y. Cao, C. A. Mirkin, K. L. Kelly, G. C. Schatz, and J. G. Zheng, “Photoinduced conversion of silver nanospheres to nanoprisms,” Science 294(5548), 1901–1903 (2001). [CrossRef] [PubMed]

27.

G. Hernandez, “Analytical description of a Fabry-Perot photoelectric spectrometer,” Appl. Opt. 5(11), 1745–1748 (1966). [CrossRef] [PubMed]

28.

L. L. Martínez, M. Segarra, M. Fernandez, and F. Espiell, “Kineteics of the dissolution of pure silver and silver-gold alloys in nitric acid solutions,” Metal. Trans. B 24(5), 827–837 (1993). [CrossRef]

29.

M. E. Grass, Y. Yue, S. E. Habas, R. M. Rioux, C. I. Teall, P. Yang, and G. A. Somorjai, “Silver ion mediated shape control of platinum nanoparticles: removal of silver by selective etching leads to increased catalytic activity,” J. Phys. Chem. C 112(13), 4797–4804 (2008). [CrossRef]

30.

P. E. Barclay, C. Santori, K. M. Fu, R. G. Beausoleil, and O. Painter, “Coherent interference effects in a nano-assembled diamond NV center cavity-QED system,” Opt. Express 17(10), 8081–8097 (2009). [CrossRef] [PubMed]

OCIS Codes
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(220.4241) Optical design and fabrication : Nanostructure fabrication
(250.5403) Optoelectronics : Plasmonics

ToC Category:
Photonic Crystals

History
Original Manuscript: August 24, 2011
Revised Manuscript: October 8, 2011
Manuscript Accepted: October 13, 2011
Published: October 24, 2011

Citation
Ishita Mukherjee, Ghazal Hajisalem,, and Reuven Gordon, "One-step integration of metal nanoparticle in photonic crystal nanobeam cavity," Opt. Express 19, 22462-22469 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-23-22462


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