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Fiber-optic interferometer for surface profile measurement with vibration suppression |
Optics Express, Vol. 19, Issue 5, pp. 4223-4230 (2011)
http://dx.doi.org/10.1364/OE.19.004223
Acrobat PDF (1054 KB)
Abstract
We describe an improved design of fiber-optic interferometer intended to measure surface profiles with enhanced capability of vibration suppression. The reference wavefront is generated directly from the measurement wave using a multi-mode fiber that eliminates only the spatial wavefront distortion by means of bend loss. The temporal fluctuation caused by vibration is consequently cancelled out in the process of interference since it becomes to exist in both the measurement and reference waves. Further, an injection locking technique is incorporated to stabilize the reference wave intensity and hence make stable the interferometric fringe intensity. Experimental result proves that the proposed fiber-optic interferometer is capable of producing sub-wavelength measurement precision even in the presence of severe vibration with 100-μm amplitude.
© 2011 OSA
1. Introduction
M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72(1), 156–160 (1982). [CrossRef]
O. Y. Kwon, “Multichannel phase-shifted interferometer,” Opt. Lett. 9(2), 59–61 (1984). [CrossRef] [PubMed]
J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, “Pixelated phase-mask dynamic interferometer,” Proc. SPIE 5531, 304–314 (2004). [CrossRef]
C. Zhao and J. H. Burge, “Vibration-compensated interferometer for surface metrology,” Appl. Opt. 40(34), 6215–6222 (2001). [CrossRef]
M. B. North-Morris, J. VanDelden, and J. C. Wyant, “Phase-shifting birefringent scatterplate interferometer,” Appl. Opt. 41(4), 668–677 (2002). [CrossRef] [PubMed]
H. Elfström, A. Lehmuskero, T. Saastamoinen, M. Kuittinen, and P. Vahimaa, “Common-path interferometer with diffractive lens,” Opt. Express 14(9), 3847–3852 (2006). [CrossRef] [PubMed]
H. Kihm and S.-W. Kim, “Fiber-diffraction interferometer for vibration desensitization,” Opt. Lett. 30(16), 2059–2061 (2005). [CrossRef] [PubMed]
2. Interferometer system design
3. Bend loss of multi-mode fiber
O. Wallner, P. J. Winzer, and W. R. Leeb, “Alignment tolerances for plane-wave to single-mode fiber coupling and their mitigation by use of pigtailed collimators,” Appl. Opt. 41(4), 637–643 (2002). [CrossRef] [PubMed]
J. P. Koplow, D. A. V. Kliner, and L. Goldberg, “Single-mode operation of a coiled multimode fiber amplifier,” Opt. Lett. 25(7), 442–444 (2000). [CrossRef]
J. M. Fini, “Bend-resistant design of conventional and microstructure fibers with very large mode area,” Opt. Express 14(1), 69–81 (2006). [CrossRef] [PubMed]
R. T. Schermer, “Mode scalability in bent optical fibers,” Opt. Express 15(24), 15674–15701 (2007). [CrossRef] [PubMed]
D. Marcuse, “Curvature loss formula for optical fibers,” J. Opt. Soc. Am. 66(3), 216–220 (1976). [CrossRef]
4. Injection locking
G. R. Hadley, “Injection locking of diode lasers,” IEEE J. Quantum Electron. 22(3), 419–426 (1986). [CrossRef]
F. Mogensen, H. Olesen, and G. Jacobsen, “Locking conditions and stability properties for a semiconductor laser with external light injection,” IEEE J. Quantum Electron. 21(7), 784–793 (1985). [CrossRef]
J. Jin, J. W. Kim, C.-S. Kang, and J.-A. Kim, “Visibility enhanced interferometer based on an injection-locking technique for low reflective materials,” Opt. Express 18(23), 23517–23522 (2010). [CrossRef] [PubMed]
5. Discussions
H. Kihm and S.-W. Kim, “Fiber-diffraction interferometer for vibration desensitization,” Opt. Lett. 30(16), 2059–2061 (2005). [CrossRef] [PubMed]
I.-B. Kong and S.-W. Kim, “General algorithm of phase-shifting interferometry by iterative least-square fitting,” Opt. Eng. 34(1), 183–188 (1995). [CrossRef]
6. Conclusions
Acknowledgements
References and links
M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72(1), 156–160 (1982). [CrossRef] | |
R. Smythe and R. Moore, “Instantaneous phase measuring interferometry,” Opt. Eng. 23, 361–364 (1984). | |
O. Y. Kwon, “Multichannel phase-shifted interferometer,” Opt. Lett. 9(2), 59–61 (1984). [CrossRef] [PubMed] | |
J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, “Pixelated phase-mask dynamic interferometer,” Proc. SPIE 5531, 304–314 (2004). [CrossRef] | |
C. Zhao and J. H. Burge, “Vibration-compensated interferometer for surface metrology,” Appl. Opt. 40(34), 6215–6222 (2001). [CrossRef] | |
M. B. North-Morris, J. VanDelden, and J. C. Wyant, “Phase-shifting birefringent scatterplate interferometer,” Appl. Opt. 41(4), 668–677 (2002). [CrossRef] [PubMed] | |
H. Elfström, A. Lehmuskero, T. Saastamoinen, M. Kuittinen, and P. Vahimaa, “Common-path interferometer with diffractive lens,” Opt. Express 14(9), 3847–3852 (2006). [CrossRef] [PubMed] | |
R. N. Smartt and W. H. Steel, “Theory and application of point-diffraction interferometers,” Jpn. J. Appl. Phys. 14, 351–356 (1975). | |
H. Kihm and S.-W. Kim, “Fiber-diffraction interferometer for vibration desensitization,” Opt. Lett. 30(16), 2059–2061 (2005). [CrossRef] [PubMed] | |
O. Wallner, P. J. Winzer, and W. R. Leeb, “Alignment tolerances for plane-wave to single-mode fiber coupling and their mitigation by use of pigtailed collimators,” Appl. Opt. 41(4), 637–643 (2002). [CrossRef] [PubMed] | |
J. P. Koplow, D. A. V. Kliner, and L. Goldberg, “Single-mode operation of a coiled multimode fiber amplifier,” Opt. Lett. 25(7), 442–444 (2000). [CrossRef] | |
J. M. Fini, “Bend-resistant design of conventional and microstructure fibers with very large mode area,” Opt. Express 14(1), 69–81 (2006). [CrossRef] [PubMed] | |
R. T. Schermer, “Mode scalability in bent optical fibers,” Opt. Express 15(24), 15674–15701 (2007). [CrossRef] [PubMed] | |
D. Marcuse, “Curvature loss formula for optical fibers,” J. Opt. Soc. Am. 66(3), 216–220 (1976). [CrossRef] | |
G. R. Hadley, “Injection locking of diode lasers,” IEEE J. Quantum Electron. 22(3), 419–426 (1986). [CrossRef] | |
F. Mogensen, H. Olesen, and G. Jacobsen, “Locking conditions and stability properties for a semiconductor laser with external light injection,” IEEE J. Quantum Electron. 21(7), 784–793 (1985). [CrossRef] | |
J. Jin, J. W. Kim, C.-S. Kang, and J.-A. Kim, “Visibility enhanced interferometer based on an injection-locking technique for low reflective materials,” Opt. Express 18(23), 23517–23522 (2010). [CrossRef] [PubMed] | |
I.-B. Kong and S.-W. Kim, “General algorithm of phase-shifting interferometry by iterative least-square fitting,” Opt. Eng. 34(1), 183–188 (1995). [CrossRef] |
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(140.3520) Lasers and laser optics : Lasers, injection-locked
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: December 21, 2010
Revised Manuscript: February 16, 2011
Manuscript Accepted: February 16, 2011
Published: February 17, 2011
Citation
Taekmin Kwon and Seung-Woo Kim, "Fiber-optic interferometer for surface profile measurement with vibration suppression," Opt. Express 19, 4223-4230 (2011)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-19-5-4223
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References
- M. Takeda, H. Ina, and S. Kobayashi, “Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry,” J. Opt. Soc. Am. 72(1), 156–160 (1982). [CrossRef]
- R. Smythe and R. Moore, “Instantaneous phase measuring interferometry,” Opt. Eng. 23, 361–364 (1984).
- O. Y. Kwon, “Multichannel phase-shifted interferometer,” Opt. Lett. 9(2), 59–61 (1984). [CrossRef] [PubMed]
- J. E. Millerd, N. J. Brock, J. B. Hayes, M. B. North-Morris, M. Novak, and J. C. Wyant, “Pixelated phase-mask dynamic interferometer,” Proc. SPIE 5531, 304–314 (2004). [CrossRef]
- C. Zhao and J. H. Burge, “Vibration-compensated interferometer for surface metrology,” Appl. Opt. 40(34), 6215–6222 (2001). [CrossRef]
- M. B. North-Morris, J. VanDelden, and J. C. Wyant, “Phase-shifting birefringent scatterplate interferometer,” Appl. Opt. 41(4), 668–677 (2002). [CrossRef] [PubMed]
- H. Elfström, A. Lehmuskero, T. Saastamoinen, M. Kuittinen, and P. Vahimaa, “Common-path interferometer with diffractive lens,” Opt. Express 14(9), 3847–3852 (2006). [CrossRef] [PubMed]
- R. N. Smartt and W. H. Steel, “Theory and application of point-diffraction interferometers,” Jpn. J. Appl. Phys. 14, 351–356 (1975).
- H. Kihm and S.-W. Kim, “Fiber-diffraction interferometer for vibration desensitization,” Opt. Lett. 30(16), 2059–2061 (2005). [CrossRef] [PubMed]
- O. Wallner, P. J. Winzer, and W. R. Leeb, “Alignment tolerances for plane-wave to single-mode fiber coupling and their mitigation by use of pigtailed collimators,” Appl. Opt. 41(4), 637–643 (2002). [CrossRef] [PubMed]
- J. P. Koplow, D. A. V. Kliner, and L. Goldberg, “Single-mode operation of a coiled multimode fiber amplifier,” Opt. Lett. 25(7), 442–444 (2000). [CrossRef]
- J. M. Fini, “Bend-resistant design of conventional and microstructure fibers with very large mode area,” Opt. Express 14(1), 69–81 (2006). [CrossRef] [PubMed]
- R. T. Schermer, “Mode scalability in bent optical fibers,” Opt. Express 15(24), 15674–15701 (2007). [CrossRef] [PubMed]
- D. Marcuse, “Curvature loss formula for optical fibers,” J. Opt. Soc. Am. 66(3), 216–220 (1976). [CrossRef]
- G. R. Hadley, “Injection locking of diode lasers,” IEEE J. Quantum Electron. 22(3), 419–426 (1986). [CrossRef]
- F. Mogensen, H. Olesen, and G. Jacobsen, “Locking conditions and stability properties for a semiconductor laser with external light injection,” IEEE J. Quantum Electron. 21(7), 784–793 (1985). [CrossRef]
- J. Jin, J. W. Kim, C.-S. Kang, and J.-A. Kim, “Visibility enhanced interferometer based on an injection-locking technique for low reflective materials,” Opt. Express 18(23), 23517–23522 (2010). [CrossRef] [PubMed]
- I.-B. Kong and S.-W. Kim, “General algorithm of phase-shifting interferometry by iterative least-square fitting,” Opt. Eng. 34(1), 183–188 (1995). [CrossRef]
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