OSA's Digital Library

Optics Express

Optics Express

  • Editor: Andrew M. Weiner
  • Vol. 21, Iss. 21 — Oct. 21, 2013
  • pp: 24582–24589
« Show journal navigation

Double-layer Fano resonance photonic crystal filters

Yichen Shuai, Deyin Zhao, Zhaobing Tian, Jung-Hun Seo, David V. Plant, Zhenqiang Ma, Shanhui Fan, and Weidong Zhou  »View Author Affiliations


Optics Express, Vol. 21, Issue 21, pp. 24582-24589 (2013)
http://dx.doi.org/10.1364/OE.21.024582


View Full Text Article

Acrobat PDF (1693 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We report ultra-compact surface-normal high-Q optical filters based on single- and double-layer stacked Fano resonance photonic crystal slabs on both Si and quartz substrates. A single layer photonic crystal filter was designed and a Q factor of 1,737 was obtained with 23 dB extinction ratio. With stacked double-layer photonic crystal configuration, the optical filter Q can increase to over 10,000,000 in design. Double-layer filters with quality factor of 9,734 and extinction ratio of 8 dB were experimentally demonstrated, for a filter design with target Q of 22,000.

© 2013 Optical Society of America

1. Introduction

2. Device design

In an optimized single layer Fano filter design, Quality factor Q of 4,500 can be achieved with r/a ratio of 0.08, as shown in Table 1, S3. For the lattice constant a of 780 nm (Case S3), the corresponding air hole radius r is 62.4 nm. Though even higher Q is expected with further reduction in r/a ratio, achieving air holes with radius much smaller than 60 nm is challenging in fabrication. And potential degradation of air hole quality with radius smaller than 60 nm will lead to significant reduction in filter Q. Experimentally, we have demonstrated single layer filters based on PDMS transfer printing of single crystalline Si PhC nanomembranes on transparent low index glass substrate. A Q factor of 1,727 was obtained with 26 dB extinction ratio, for Design S1 with r/a = 0.08 and a = 765 nm.

On the other hand, much higher Q’s can be achieved by coupled double-layer Fano resonance PhC structures. Liu and Fan et al [4

4. V. Liu, M. Povinelli, and S. Fan, “Resonance-enhanced optical forces between coupled photonic crystal slabs,” Opt. Express 17(24), 21897–21909 (2009). [CrossRef] [PubMed]

] reported earlier that much higher Q can arise from the coupled dark states in the double-layer stacked PhC structures. We report here design and experimental demonstrations of coupled double-layer Fano resonance PhC filters. Some designs are summarized in Table 1, for cases D1 to D3. With the reduction in r/a value to 0.05, the filter Q increases to 98,000, which is one order of magnitude higher than the values in single-layer structures. Shown in Fig. 2
Fig. 2 Simulated transmission spectra for (a,b) single- and (c,d) double-layer Fano resonance PhC filters, where (b) and (d) are zoom-in plots of (a) and (c), respectively. The design parameters are summarized in Table 1 for Case S3 and D3, respectively.
are the simulated transmission spectra for Designs S3 and D3, with Q of 4,500 and 98,000 respectively. Additionally, it was predicted that the double-layer PhC structure can excited extremely high Q mode (infinite in theory), by varying the coupling condition between two PhC layers [4

4. V. Liu, M. Povinelli, and S. Fan, “Resonance-enhanced optical forces between coupled photonic crystal slabs,” Opt. Express 17(24), 21897–21909 (2009). [CrossRef] [PubMed]

]. Based on the Design D2 parameters, transmission spectra were simulated by varying the buffer layer oxide thickness tb,.

For the double-layer structure, the simulated transmission spectra are plotted in Fig. 3(a)
Fig. 3 Simulation results for Design D2 with different buffer layer thicknesses tb: (a) Transmission spectra with different tb from 0 nm to 160 nm; (b) High Q resonant wavelengths and the corresponding Q values for different buffer thicknesses tb; (c) Zoom-in spectrum for the buffer thickness tb = 60 nm and filter Q of 10,000,000; and (d) Simulated E-field intensity profile at resonant wavelengths for three different tb values, where tb = 60 nm representing the highest Q condition for this design.
, with oxide buffer thicknesses range from 0 to 160 nm. With the increase of oxide buffer layer thicknesses, the high Q modes (shorter wavelength modes shown in Fig. 3(a) shift towards shorter wavelengths, with the filter Q value maximizes around 10,000,000 for buffer layer thickness tb = 60 nm, as shown in Fig. 3(b). Shown in Fig. 3(c) is the zoom-in spectral plot for the transmission dip with Q of 10,000,000. Simulated field distribution profiles for three cases close to the maximum Q are shown in Fig. 3(d), where strong field confinement is evident for the high Q transmission dips at optimal buffer layer thickness.

3. Device fabrication and characterization

Single-layer Fano resonance PhC filters were first patterned on silicon-on-insulator (SOI) substrates, based on electron-beam lithography (EBL) and reactive-ion etching (RIE) processes. It was then transferred onto glass substrates using transfer printing process [32

32. H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett. 24(6), 476–478 (2012). [CrossRef]

]. Shown in Figs. 4(a)
Fig. 4 Experimental results for Design S1: (a) Top and (b) Cross-section views of fabricated single-layer PhC Fano resonance filters on oxide buffer; (c) Measured (blue solid line) and simulated (red dash line) transmission spectra for the fabricated single-layer PhC Fano resonance filter transferred on glass substrates; and (d) Zoom-in of (c) over the second dip (λ = 1564.62 nm) region.
and 4(b) are scanning electron microscope (SEM) images of the fabricated single layer Fano filters on glass substrate. The single layer Fano filters were characterized with a tunable laser (1 pm tuning step) based setup for transmission measurement over wavelengths of 1490 nm to 1650 nm. The measured (blue solid line) and simulated (red dash line) transmission spectra are shown in Fig. 4(c), with zoom-ins shown in Fig. 4(d). Two transmission dips were found, at 1529.88 nm and 1564.62 nm. For the 1564.62 nm dip, the Q value of 1,737 was obtained, with 26 dB extinction ratio.

Two types of structures were prepared for double-layer PhC Fano filters on silicon and on quartz substrates, respectively. For the double-layer PhC Fano filters on SOI, low index oxide buffer layer was first formed by thermal oxidation of single-crystalline Si layer on the SOI substrate, followed by low pressure chemical vapor deposition (LPCVD) poly-Si deposition process, to form a poly-Si/thermal SiO2/crystalline-Si double-Si-layer structure.

A single EBL pattern was used to etch through the complete poly-Si/SiO2/c-Si structure, with a combination of two RIE steps for two Si layer etching and a short buffer oxide etch (BOE) dip for SiO2 buffer layer etching. For better etching selectivity, e-beam resist pattern was transferred onto a Cr metal layer to form a hard mask for the double-layer Si dry etching. Shown in Figs. 5(a)
Fig. 5 Cross-sectional SEM images for fabricated double-layer PhC Fano resonance filters based on Design D2 parameters: (a, b, c) Double-layer PhC structure was formed by poly-Si deposition on top of the SOI substrates; and (d) Double-layer PhC structure was formed by two steps of poly-Si deposition on quartz substrates. Notice the oxide buffer thicknesses are 20 nm, 160 nm, and 20 nm, for cases (b), (c), and (d), respectively.
-5(c) are cross-sectional SEM images for double-layer poly-Si/SiO2/c-Si filter structure, with different thermal oxide thicknesses.

The other double-layer PhC Fano filters on quartz substrates were formed by two steps of LPCVD poly-Si deposition process, with a plasma-enhanced chemical vapor deposited (PECVD) SiO2 layer sandwiched in between these two LPCVD poly-Si layers. The same E-beam patterning and etching processes were utilized for the 2D-PhC patterning. A SEM image is shown in Fig. 5(d).

The double-layer Fano filters were characterized by measuring transmission or reflection spectra for the two different configurations respectively. For the transmission measurement on a double-layer filter quartz substrate, a transmission dip at 1545.2 nm was obtained, with an estimated Q of 5,000 and 2.7dB extinction ratio (Fig. 6(a)
Fig. 6 (a, b) Measured (blue solid line) and simulated (red dash line) transmission spectra for the double-layer PhC Fano resonance filters on quartz; and (c, d) Measured (blue solid line) and simulated (red dash line) reflection spectra for the double-layer PhC Fano resonance filters on SOI. (b) and (d) are zoom-in’s of (a), (c), respectively.
and 6(b)). For the reflection measurement on a double-layer filter on SOI substrate, a reflection peak was obtained at 1567 nm with Q factor of 9,734 and an 8dB extinction ratio (Fig. 6(c) and 6(d)). All these measured spectra match well with the simulated ones at these resonance locations (wit spectral dips or peaks). Measured Q values are less than the designed ones, which may come from the imperfect etching process of air holes, such as the conical shape and different hole sizes in this trilayer structure. We expect the filter performance can be improved with much higher Q factors by optimizing the fabrication process.

4. Conclusion

In conclusion, high Q surface-normal Fano resonance filters were designed and demonstrated experimentally based on single- and double-layer PhC structures. Higher Q filters can be obtained in double-layer PhC structures, with optimized Q of 22,000 by design and experimentally demonstrated Q close to 10,000. With fining tuning of double layer buffer layer thicknesses, it is possible to obtained extremely high Q (10,000,000 or higher) from the coupled dark state resonances [4

4. V. Liu, M. Povinelli, and S. Fan, “Resonance-enhanced optical forces between coupled photonic crystal slabs,” Opt. Express 17(24), 21897–21909 (2009). [CrossRef] [PubMed]

].

Acknowledgments

This work is supported in part by US AFOSR MURI programs under Grant FA9550-08-1-0337 and FA9550-09-1-0704 by AFOSR under grant FA9550-11-C-0026, and in part by US ARO under Grant W911NF-09-1-0505.

References and links

1.

A. E. Miroshnichenko, S. Flach, and Y. S. Kivshar, “Fano resonances in nanoscale structures,” Rev. Mod. Phys. 82(3), 2257–2298 (2010). [CrossRef]

2.

B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater. 9(9), 707–715 (2010). [CrossRef] [PubMed]

3.

S. Fan and J. D. Joannopoulos, “Analysis of guided resonances in photonic crystal slabs,” Phys. Rev. B 65(23), 235112 (2002). [CrossRef]

4.

V. Liu, M. Povinelli, and S. Fan, “Resonance-enhanced optical forces between coupled photonic crystal slabs,” Opt. Express 17(24), 21897–21909 (2009). [CrossRef] [PubMed]

5.

W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D. 42(23), 234007 (2009). [CrossRef]

6.

W. Suh, M. F. Yanik, O. Solgaard, and S. Fan, “Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs,” Appl. Phys. Lett. 82(13), 1999 (2003). [CrossRef]

7.

R. Magnusson and S. S. Wang, “New principle for optical filters,” Appl. Phys. Lett. 61(9), 1022 (1992). [CrossRef]

8.

R. Magnusson and M. Shokooh-Saremi, “Physical basis for wideband resonant reflectors,” Opt. Express 16(5), 3456–3462 (2008). [CrossRef] [PubMed]

9.

M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007). [CrossRef]

10.

C. J. Chang-Hasnain, “High-contrast gratings as a new platform for integrated optoelectronics,” Semicond. Sci. Technol. 26(1), 014043 (2011). [CrossRef]

11.

Y. Kanamori, T. Kitani, and K. Hane, “Control of guided resonance in a photonic crystal slab using microelectromechanical actuators,” Appl. Phys. Lett. 90(3), 031911 (2007). [CrossRef]

12.

K. B. Crozier, V. Lousse, O. Kilic, S. Kim, S. Fan, and O. Solgaard, “Air-bridged photonic crystal slabs at visible and near-infrared wavelengths,” Phys. Rev. B 73(11), 115126 (2006). [CrossRef]

13.

C. Grillet, D. Freeman, B. Luther-Davies, S. Madden, R. McPhedran, D. J. Moss, M. J. Steel, and B. J. Eggleton, “Characterization and modeling of Fano resonances in chalcogenide photonic crystal membranes,” Opt. Express 14(1), 369–376 (2006). [CrossRef] [PubMed]

14.

L. Zhou and A. W. Poon, “Fano resonance-based electrically reconfigurable add-drop filters in silicon microring resonator-coupled Mach-Zehnder interferometers,” Opt. Lett. 32(7), 781–783 (2007). [CrossRef] [PubMed]

15.

S. Fan, “Sharp asymmetric line shapes in side-coupled waveguide-cavity systems,” Appl. Phys. Lett. 80(6), 908 (2002). [CrossRef]

16.

L. Y. Mario, S. Darmawan, and M. K. Chin, “Asymmetric Fano resonance and bistability for high extinction ratio, large modulation depth, and low power switching,” Opt. Express 14(26), 12770–12781 (2006). [CrossRef] [PubMed]

17.

C. Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microrings with sharp asymmetrical resonance,” Appl. Phys. Lett. 83(8), 1527 (2003). [CrossRef]

18.

W. Suh, O. Solgaard, and S. Fan, “Displacement sensing using evanescent tunneling between guided resonances in photonic crystal slabs,” J. Appl. Phys. 98(3), 033102 (2005). [CrossRef]

19.

A. Rosenberg, M. Carter, J. Casey, M. Kim, R. Holm, R. Henry, C. Eddy, V. Shamamian, K. Bussmann, S. Shi, and D. W. Prather, “Guided resonances in asymmetrical GaN photonic crystal slabs observed in the visible spectrum,” Opt. Express 13(17), 6564–6571 (2005). [CrossRef] [PubMed]

20.

N. Inoue and T. Baba, “External control of guided resonance in photonic crystal slab by changing the index anisotropy of liquid crystal,” Proc. SPIE 6352, 63520R, 63520R-8 (2006). [CrossRef]

21.

O. Levi, M. M. Lee, J. Zhang, V. Lousse, S. R. J. Brueck, S. Fan, and J. S. Harris, “Sensitivity analysis of a photonic crystal structure for index-of-refraction sensing,” Proc. SPIE 6447, 64470P, 64470P-9 (2007). [CrossRef]

22.

R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett. 90(20), 201105 (2007). [CrossRef]

23.

E. Bisaillon, D. Tan, B. Faraji, A. Kirk, L. Chrowstowski, and D. V. Plant, “High reflectivity air-bridge subwavelength grating reflector and Fabry-Perot cavity in AlGaAs/GaAs,” Opt. Express 14(7), 2573–2582 (2006). [CrossRef] [PubMed]

24.

J. H. Kim, L. Chrostowski, E. Bisaillon, and D. V. Plant, “DBR, Sub-wavelength grating, and Photonic crystal slab Fabry-Perot cavity design using phase analysis by FDTD,” Opt. Express 15(16), 10330–10339 (2007). [CrossRef] [PubMed]

25.

S. Boutami, B. Benbakir, X. Letartre, J. L. Leclercq, P. Regreny, and P. Viktorovitch, “Ultimate vertical Fabry-Perot cavity based on single-layer photonic crystal mirrors,” Opt. Express 15(19), 12443–12449 (2007). [CrossRef] [PubMed]

26.

C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett. 24(6), 455–457 (2012). [CrossRef]

27.

H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics 6(9), 617–622 (2012). [CrossRef]

28.

H. Yang, Z. Qiang, H. Pang, Z. Ma, and W. D. Zhou, “Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates,” Electron. Lett. 44(14), 858–859 (2008). [CrossRef]

29.

Z. Qiang, H. Yang, L. Chen, H. Pang, Z. Ma, and W. Zhou, “Fano filters based on transferred silicon nanomembranes on plastic substrates,” Appl. Phys. Lett. 93(6), 061106 (2008). [CrossRef]

30.

L. Chen, Z. Qiang, H. Yang, H. Pang, Z. Ma, and W. D. Zhou, “Polarization and angular dependent transmissions on transferred nanomembrane Fano filters,” Opt. Express 17(10), 8396–8406 (2009). [CrossRef] [PubMed]

31.

M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater. 5(1), 33–38 (2005). [CrossRef]

32.

H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett. 24(6), 476–478 (2012). [CrossRef]

33.

M. Lipson, “Guiding, modulating, and emitting light on silicon-challenges and opportunities,” J. Lightwave Technol. 23(12), 4222–4238 (2005). [CrossRef]

34.

D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, “Ultralow-loss polycrystalline silicon waveguides and high uniformity 1x12 MMI fanout for 3D photonic integration,” Opt. Express 20(19), 21722–21728 (2012). [CrossRef] [PubMed]

35.

V. Liu and S. Fan, “S4: A free electromagnetic solver for layered periodic structures,” Comput. Phys. Commun. 183(10), 2233–2244 (2012). [CrossRef]

36.

Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012. [CrossRef]

OCIS Codes
(350.2460) Other areas of optics : Filters, interference
(350.4238) Other areas of optics : Nanophotonics and photonic crystals
(050.5298) Diffraction and gratings : Photonic crystals

ToC Category:
Fiber Optics

History
Original Manuscript: August 14, 2013
Revised Manuscript: September 27, 2013
Manuscript Accepted: September 27, 2013
Published: October 7, 2013

Citation
Yichen Shuai, Deyin Zhao, Zhaobing Tian, Jung-Hun Seo, David V. Plant, Zhenqiang Ma, Shanhui Fan, and Weidong Zhou, "Double-layer Fano resonance photonic crystal filters," Opt. Express 21, 24582-24589 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-21-24582


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. A. E. Miroshnichenko, S. Flach, and Y. S. Kivshar, “Fano resonances in nanoscale structures,” Rev. Mod. Phys.82(3), 2257–2298 (2010). [CrossRef]
  2. B. Luk’yanchuk, N. I. Zheludev, S. A. Maier, N. J. Halas, P. Nordlander, H. Giessen, and C. T. Chong, “The Fano resonance in plasmonic nanostructures and metamaterials,” Nat. Mater.9(9), 707–715 (2010). [CrossRef] [PubMed]
  3. S. Fan and J. D. Joannopoulos, “Analysis of guided resonances in photonic crystal slabs,” Phys. Rev. B65(23), 235112 (2002). [CrossRef]
  4. V. Liu, M. Povinelli, and S. Fan, “Resonance-enhanced optical forces between coupled photonic crystal slabs,” Opt. Express17(24), 21897–21909 (2009). [CrossRef] [PubMed]
  5. W. Zhou, Z. Ma, H. Yang, Z. Qiang, G. Qin, H. Pang, L. Chen, W. Yang, S. Chuwongin, and D. Zhao, “Flexible photonic-crystal Fano filters based on transferred semiconductor nanomembranes,” J. Phys. D.42(23), 234007 (2009). [CrossRef]
  6. W. Suh, M. F. Yanik, O. Solgaard, and S. Fan, “Displacement-sensitive photonic crystal structures based on guided resonance in photonic crystal slabs,” Appl. Phys. Lett.82(13), 1999 (2003). [CrossRef]
  7. R. Magnusson and S. S. Wang, “New principle for optical filters,” Appl. Phys. Lett.61(9), 1022 (1992). [CrossRef]
  8. R. Magnusson and M. Shokooh-Saremi, “Physical basis for wideband resonant reflectors,” Opt. Express16(5), 3456–3462 (2008). [CrossRef] [PubMed]
  9. M. C. Huang, Y. Zhou, and C. J. Chang-Hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics1(2), 119–122 (2007). [CrossRef]
  10. C. J. Chang-Hasnain, “High-contrast gratings as a new platform for integrated optoelectronics,” Semicond. Sci. Technol.26(1), 014043 (2011). [CrossRef]
  11. Y. Kanamori, T. Kitani, and K. Hane, “Control of guided resonance in a photonic crystal slab using microelectromechanical actuators,” Appl. Phys. Lett.90(3), 031911 (2007). [CrossRef]
  12. K. B. Crozier, V. Lousse, O. Kilic, S. Kim, S. Fan, and O. Solgaard, “Air-bridged photonic crystal slabs at visible and near-infrared wavelengths,” Phys. Rev. B73(11), 115126 (2006). [CrossRef]
  13. C. Grillet, D. Freeman, B. Luther-Davies, S. Madden, R. McPhedran, D. J. Moss, M. J. Steel, and B. J. Eggleton, “Characterization and modeling of Fano resonances in chalcogenide photonic crystal membranes,” Opt. Express14(1), 369–376 (2006). [CrossRef] [PubMed]
  14. L. Zhou and A. W. Poon, “Fano resonance-based electrically reconfigurable add-drop filters in silicon microring resonator-coupled Mach-Zehnder interferometers,” Opt. Lett.32(7), 781–783 (2007). [CrossRef] [PubMed]
  15. S. Fan, “Sharp asymmetric line shapes in side-coupled waveguide-cavity systems,” Appl. Phys. Lett.80(6), 908 (2002). [CrossRef]
  16. L. Y. Mario, S. Darmawan, and M. K. Chin, “Asymmetric Fano resonance and bistability for high extinction ratio, large modulation depth, and low power switching,” Opt. Express14(26), 12770–12781 (2006). [CrossRef] [PubMed]
  17. C. Y. Chao and L. J. Guo, “Biochemical sensors based on polymer microrings with sharp asymmetrical resonance,” Appl. Phys. Lett.83(8), 1527 (2003). [CrossRef]
  18. W. Suh, O. Solgaard, and S. Fan, “Displacement sensing using evanescent tunneling between guided resonances in photonic crystal slabs,” J. Appl. Phys.98(3), 033102 (2005). [CrossRef]
  19. A. Rosenberg, M. Carter, J. Casey, M. Kim, R. Holm, R. Henry, C. Eddy, V. Shamamian, K. Bussmann, S. Shi, and D. W. Prather, “Guided resonances in asymmetrical GaN photonic crystal slabs observed in the visible spectrum,” Opt. Express13(17), 6564–6571 (2005). [CrossRef] [PubMed]
  20. N. Inoue and T. Baba, “External control of guided resonance in photonic crystal slab by changing the index anisotropy of liquid crystal,” Proc. SPIE6352, 63520R, 63520R-8 (2006). [CrossRef]
  21. O. Levi, M. M. Lee, J. Zhang, V. Lousse, S. R. J. Brueck, S. Fan, and J. S. Harris, “Sensitivity analysis of a photonic crystal structure for index-of-refraction sensing,” Proc. SPIE6447, 64470P, 64470P-9 (2007). [CrossRef]
  22. R. Harbers, S. Jochim, N. Moll, R. F. Mahrt, D. Erni, J. A. Hoffnagle, and W. D. Hinsberg, “Control of Fano line shapes by means of photonic crystal structures in a dye-doped polymer,” Appl. Phys. Lett.90(20), 201105 (2007). [CrossRef]
  23. E. Bisaillon, D. Tan, B. Faraji, A. Kirk, L. Chrowstowski, and D. V. Plant, “High reflectivity air-bridge subwavelength grating reflector and Fabry-Perot cavity in AlGaAs/GaAs,” Opt. Express14(7), 2573–2582 (2006). [CrossRef] [PubMed]
  24. J. H. Kim, L. Chrostowski, E. Bisaillon, and D. V. Plant, “DBR, Sub-wavelength grating, and Photonic crystal slab Fabry-Perot cavity design using phase analysis by FDTD,” Opt. Express15(16), 10330–10339 (2007). [CrossRef] [PubMed]
  25. S. Boutami, B. Benbakir, X. Letartre, J. L. Leclercq, P. Regreny, and P. Viktorovitch, “Ultimate vertical Fabry-Perot cavity based on single-layer photonic crystal mirrors,” Opt. Express15(19), 12443–12449 (2007). [CrossRef] [PubMed]
  26. C. Sciancalepore, B. B. Bakir, X. Letartre, J. Harduin, N. Olivier, C. Seassal, J. Fedeli, and P. Viktorovitch, “CMOS-compatible ultra-compact 1.55- um emitting VCSELs using double photonic crystal mirrors,” IEEE Photon. Technol. Lett.24(6), 455–457 (2012). [CrossRef]
  27. H. Yang, D. Zhao, S. Chuwongin, J. H. Seo, W. Yang, Y. Shuai, J. Berggren, M. Hammar, Z. Ma, and W. Zhou, “Transfer-printed stacked nanomembrane lasers on silicon,” Nat. Photonics6(9), 617–622 (2012). [CrossRef]
  28. H. Yang, Z. Qiang, H. Pang, Z. Ma, and W. D. Zhou, “Surface-Normal Fano Filters Based on Transferred Silicon Nanomembranes on Glass Substrates,” Electron. Lett.44(14), 858–859 (2008). [CrossRef]
  29. Z. Qiang, H. Yang, L. Chen, H. Pang, Z. Ma, and W. Zhou, “Fano filters based on transferred silicon nanomembranes on plastic substrates,” Appl. Phys. Lett.93(6), 061106 (2008). [CrossRef]
  30. L. Chen, Z. Qiang, H. Yang, H. Pang, Z. Ma, and W. D. Zhou, “Polarization and angular dependent transmissions on transferred nanomembrane Fano filters,” Opt. Express17(10), 8396–8406 (2009). [CrossRef] [PubMed]
  31. M. Meitl, Z. Zhu, V. Kumar, K. Lee, X. Feng, Y. Huang, I. Adesida, R. Nuzzo, and J. Rogers, “Transfer printing by kinetic control of adhesion to an elastomeric stamp,” Nat. Mater.5(1), 33–38 (2005). [CrossRef]
  32. H. Yang, D. Zhao, J. Seo, S. Kim, J. Rogers, Z. Ma, and W. Zhou, “Broadband Membrane Reflectors on Glass,” IEEE Photon. Technol. Lett.24(6), 476–478 (2012). [CrossRef]
  33. M. Lipson, “Guiding, modulating, and emitting light on silicon-challenges and opportunities,” J. Lightwave Technol.23(12), 4222–4238 (2005). [CrossRef]
  34. D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, “Ultralow-loss polycrystalline silicon waveguides and high uniformity 1x12 MMI fanout for 3D photonic integration,” Opt. Express20(19), 21722–21728 (2012). [CrossRef] [PubMed]
  35. V. Liu and S. Fan, “S4: A free electromagnetic solver for layered periodic structures,” Comput. Phys. Commun.183(10), 2233–2244 (2012). [CrossRef]
  36. Y. Shuai, D. Zhao, Z. Tian, J. H. Seo, R. Jacobson, D. V. Plant, M. G. Lagally, S. Fan, Z. Ma, and W. Zhou, “Stacked Fano Resonance Photonic Crystal Nanomembrane High-Q Filters,” in IEEE Photonics Conference, San Francisco, CA, 2012. [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited