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Ptycholographic iterative engine with self-positioned scanning illumination |
Optics Express, Vol. 21, Issue 5, pp. 6162-6168 (2013)
http://dx.doi.org/10.1364/OE.21.006162
Acrobat PDF (2451 KB)
Abstract
A special optical alignment is adopted and corresponding reconstruction algorithm is developed to reduce the reconstruction error induced by the hysteresis or backlash error of the translation stage in Ptychographical Iterative Engine (PIE) imaging with weak scattering specimen. In this suggested method, the positions of the scanning probe are determined directly from the recorded diffraction patterns rather than from the readout of the stage meter. This method not only remarkably improves the reconstruction quality, but also completely lowers the dependency of PIE on the device accuracy and accordingly enhances its feasibility for many applications with weak scattering specimen.
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1. Introduction
J. M. Rodenburg, “Ptychography and related diffractive imaging methods,” Adv. Imaging Electron Phys. 150, 87–184 (2008). [CrossRef]
H. M. L. Faulkner and J. M. Rodenburg, “Movable aperture lensless transmission microscopy: a novel phase retrieval algorithm,” Phys. Rev. Lett. 93(2), 023903 (2004). [CrossRef] [PubMed]
C. Liu, T. Walther, and J. M. Rodenburg, “Influence of thick crystal effects on ptychographic image reconstruction with moveable illumination,” Ultramicroscopy 109(10), 1263–1275 (2009). [CrossRef] [PubMed]
A. M. Maiden, J. M. Rodenburg, and M. J. Humphry, “Optical ptychography: a practical implementation with useful resolution,” Opt. Lett. 35(15), 2585–2587 (2010). [CrossRef] [PubMed]
S. B. Jung and S. W. Kim, “Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control,” Precis. Eng. 16(1), 49–55 (1994). [CrossRef]
C. H. Ru and L. N. Sun, “Improving positioning accuracy of piezoelectric actuators by feedforward hysteresis compensation based on a new mathematical model,” Rev. Sci. Instrum. 76(9), 095111 (2005). [CrossRef]
2. Basic principle of PIE imaging
A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy 109(10), 1256–1262 (2009). [CrossRef] [PubMed]
F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B 82(12), 121415 (2010). [CrossRef]
J. R. Fienup, “Phase retrieval algorithms: a comparison,” Appl. Opt. 21(15), 2758–2769 (1982). [CrossRef] [PubMed]
M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature 483(7390), 444–447 (2012). [CrossRef] [PubMed]
A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy 109(10), 1256–1262 (2009). [CrossRef] [PubMed]
3. The principle of the suggested method
4. Experimental results
5. Conclusion
Acknowledgments
References and links
J. M. Rodenburg, “Ptychography and related diffractive imaging methods,” Adv. Imaging Electron Phys. 150, 87–184 (2008). [CrossRef] | |
M. J. Humphry, B. Kraus, A. C. Hurst, A. M. Maiden, and J. M. Rodenburg, “Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging,” Nature Commun. 3, 730 (2012), doi:. [CrossRef] | |
H. M. L. Faulkner and J. M. Rodenburg, “Movable aperture lensless transmission microscopy: a novel phase retrieval algorithm,” Phys. Rev. Lett. 93(2), 023903 (2004). [CrossRef] [PubMed] | |
C. Liu, T. Walther, and J. M. Rodenburg, “Influence of thick crystal effects on ptychographic image reconstruction with moveable illumination,” Ultramicroscopy 109(10), 1263–1275 (2009). [CrossRef] [PubMed] | |
A. M. Maiden, J. M. Rodenburg, and M. J. Humphry, “Optical ptychography: a practical implementation with useful resolution,” Opt. Lett. 35(15), 2585–2587 (2010). [CrossRef] [PubMed] | |
S. B. Jung and S. W. Kim, “Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control,” Precis. Eng. 16(1), 49–55 (1994). [CrossRef] | |
C. H. Ru and L. N. Sun, “Improving positioning accuracy of piezoelectric actuators by feedforward hysteresis compensation based on a new mathematical model,” Rev. Sci. Instrum. 76(9), 095111 (2005). [CrossRef] | |
A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy 109(10), 1256–1262 (2009). [CrossRef] [PubMed] | |
J. M. Rodenburg and H. M. L. Faulkner, “phase retrieval algorithm for shifting illumination,” Appl. Phys. Lett. 85(20), 4795–4797 (2004). [CrossRef] | |
F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B 82(12), 121415 (2010). [CrossRef] | |
J. R. Fienup, “Phase retrieval algorithms: a comparison,” Appl. Opt. 21(15), 2758–2769 (1982). [CrossRef] [PubMed] | |
J. R. Fienup and C. C. Wackerman, “Phase retrieval stagnation problems and solutions,” J. Opt. Soc. Am. A 3(11), 1897–1907 (1986). [CrossRef] | |
B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys. 4(5), 394–398 (2008). [CrossRef] | |
J. C. H. Spence, U. Weierstall, and M. Howells, “Coherence and sampling requirements for diffractive imaging,” Ultramicroscopy 101(2-4), 149–152 (2004). [CrossRef] [PubMed] | |
M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature 483(7390), 444–447 (2012). [CrossRef] [PubMed] |
OCIS Codes
(100.5070) Image processing : Phase retrieval
(110.1650) Imaging systems : Coherence imaging
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
ToC Category:
Image Processing
History
Original Manuscript: January 10, 2013
Revised Manuscript: February 9, 2013
Manuscript Accepted: February 10, 2013
Published: March 4, 2013
Citation
Xinchen Pan, Cheng Liu, Qiang Lin, and Jianqiang Zhu, "Ptycholographic iterative engine with self-positioned scanning illumination," Opt. Express 21, 6162-6168 (2013)
http://www.opticsinfobase.org/oe/abstract.cfm?URI=oe-21-5-6162
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References
- J. M. Rodenburg, “Ptychography and related diffractive imaging methods,” Adv. Imaging Electron Phys.150, 87–184 (2008). [CrossRef]
- M. J. Humphry, B. Kraus, A. C. Hurst, A. M. Maiden, and J. M. Rodenburg, “Ptychographic electron microscopy using high-angle dark-field scattering for sub-nanometre resolution imaging,” Nature Commun.3, 730 (2012), doi:. [CrossRef]
- H. M. L. Faulkner and J. M. Rodenburg, “Movable aperture lensless transmission microscopy: a novel phase retrieval algorithm,” Phys. Rev. Lett.93(2), 023903 (2004). [CrossRef] [PubMed]
- C. Liu, T. Walther, and J. M. Rodenburg, “Influence of thick crystal effects on ptychographic image reconstruction with moveable illumination,” Ultramicroscopy109(10), 1263–1275 (2009). [CrossRef] [PubMed]
- A. M. Maiden, J. M. Rodenburg, and M. J. Humphry, “Optical ptychography: a practical implementation with useful resolution,” Opt. Lett.35(15), 2585–2587 (2010). [CrossRef] [PubMed]
- S. B. Jung and S. W. Kim, “Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference control,” Precis. Eng.16(1), 49–55 (1994). [CrossRef]
- C. H. Ru and L. N. Sun, “Improving positioning accuracy of piezoelectric actuators by feedforward hysteresis compensation based on a new mathematical model,” Rev. Sci. Instrum.76(9), 095111 (2005). [CrossRef]
- A. M. Maiden and J. M. Rodenburg, “An improved ptychographical phase retrieval algorithm for diffractive imaging,” Ultramicroscopy109(10), 1256–1262 (2009). [CrossRef] [PubMed]
- J. M. Rodenburg and H. M. L. Faulkner, “phase retrieval algorithm for shifting illumination,” Appl. Phys. Lett.85(20), 4795–4797 (2004). [CrossRef]
- F. Hue, J. M. Rodenburg, A. M. Maiden, F. Sweeney, and P. A. Midgley, “Wave-front phase retrieval in transmission electron microscopy via ptychography,” Phys. Rev. B82(12), 121415 (2010). [CrossRef]
- J. R. Fienup, “Phase retrieval algorithms: a comparison,” Appl. Opt.21(15), 2758–2769 (1982). [CrossRef] [PubMed]
- J. R. Fienup and C. C. Wackerman, “Phase retrieval stagnation problems and solutions,” J. Opt. Soc. Am. A3(11), 1897–1907 (1986). [CrossRef]
- B. Abbey, K. A. Nugent, G. J. Williams, J. N. Clark, A. G. Peele, M. A. Pfeifer, M. D. Jonge, and I. McNulty, “Keyhole coherent diffractive imaging,” Nat. Phys.4(5), 394–398 (2008). [CrossRef]
- J. C. H. Spence, U. Weierstall, and M. Howells, “Coherence and sampling requirements for diffractive imaging,” Ultramicroscopy101(2-4), 149–152 (2004). [CrossRef] [PubMed]
- M. C. Scott, C. C. Chen, M. Mecklenburg, C. Zhu, R. Xu, P. Ercius, U. Dahmen, B. C. Regan, and J. W. Miao, “Electron tomography at 2.4-angstrom resolution,” Nature483(7390), 444–447 (2012). [CrossRef] [PubMed]
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