Topics in this Issue
Computer controlled polishing requires accurate knowledge of the tool influence function (TIF) for the polishing tool (i.e. lap). The authors propose the parametric edge TIFs for orbital and spin tool motion cases were generated by multiplying the κ map (i.e. the spatial distribution of the Preston's coefficient) by the basic edge TIF (with κ =1) introduced in Section 3.1. [See - D. W. Kim et al. Table 1 for details.]
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