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Jason S. Orcutt, Anatol Khilo, Charles W. Holzwarth, Milos A. Popović, Hanqing Li, Jie Sun, Thomas Bonifield, Randy Hollingsworth, Franz X. Kärtner, Henry I. Smith, Vladimir Stojanović, and Rajeev J. Ram, "Nanophotonic integration in state-of-the-art CMOS foundries," Opt. Express 19, 2335-2346 (2011)