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Article Information

Qing-Yuan Cai, Yu-Xiang Zheng, Dong-Xu Zhang, Wei-Jie Lu, Rong-Jun Zhang, Wei Lin, Hai-Bin Zhao, and Liang-Yao Chen, "Application of image spectrometer to in situ infrared broadband optical monitoring for thin film deposition," Opt. Express 19, 12969-12977 (2011)

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