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Article Information

Jiangping Zhu, Song Hu, Junsheng. Yu, Shaolin Zhou, Yan Tang, Min Zhong, Lixin Zhao, Minyong Chen, Lanlan Li, Yu He, and Wei Jiang, "Four-quadrant gratings moiré fringe alignment measurement in proximity lithography," Opt. Express 21, 3463-3473 (2013)

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