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Optics Letters

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  • Vol. 12, Iss. 5 — May. 1, 1987
  • pp: 310–312

Interferometer for measuring displacement and distance

Toshihiro Kubota, Makoto Nara, and Toshihiko Yoshino  »View Author Affiliations


Optics Letters, Vol. 12, Issue 5, pp. 310-312 (1987)
http://dx.doi.org/10.1364/OL.12.000310


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Abstract

A simple interferometer for measuring both relative displacement and absolute distance is fabricated that uses a laser diode. The sign of the displacement is detected by means of a λ/8 plate, and the distance is measured by a FM radar technique of modulating the laser-diode frequency. Measurement accuracies of 0.02 μm for displacement and 100 μm for distance are obtained over a range of a few meters.

© 1987 Optical Society of America

History
Original Manuscript: December 30, 1986
Manuscript Accepted: February 5, 1987
Published: May 1, 1987

Citation
Toshihiro Kubota, Makoto Nara, and Toshihiko Yoshino, "Interferometer for measuring displacement and distance," Opt. Lett. 12, 310-312 (1987)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-12-5-310


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