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Optics Letters

Optics Letters


  • Vol. 21, Iss. 20 — Oct. 15, 1996
  • pp: 1619–1621

Angle-resolved polarimetric phase measurement for the characterization of gratings

H. Giovannini, C. Deumié, H. Akhouayri, and C. Amra  »View Author Affiliations

Optics Letters, Vol. 21, Issue 20, pp. 1619-1621 (1996)

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A goniometric ellipsometer is used to recover the optogeometrical parameters of metallic gratings. The phase difference between TE and TM polarizations in all the diffracted orders is measured as a function of the incidence angle. The groove depth, together with the refractive indices of all the media of the diffracting structure, is determined for a holographic sinusoidal aluminum grating. It is shown that a thin layer of alumina on top of the grating must be considered.

© 1996 Optical Society of America

Original Manuscript: June 10, 1996
Published: October 15, 1996

H. Giovannini, C. Deumié, H. Akhouayri, and C. Amra, "Angle-resolved polarimetric phase measurement for the characterization of gratings," Opt. Lett. 21, 1619-1621 (1996)

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