Grating interferometer for flatness testing
Optics Letters, Vol. 21, Issue 3, pp. 228-230 (1996)
http://dx.doi.org/10.1364/OL.21.000228
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Abstract
Two diffraction gratings placed in front of a f lat surface generate an interference pattern representing the surface deformations. The interference pattern is achromatic and has an equivalent wavelength between 4 and 40 µm, depending on the grating frequencies and the viewing angle. Using phase-shifting techniques, the grating interferometer provides high-precision profile measurements of both smooth and rough surfaces.
© 1996 Optical Society of America
Citation
Peter J. de Groot, "Grating interferometer for flatness testing," Opt. Lett. 21, 228-230 (1996)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-21-3-228
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