Polarization-independent waveguiding at 1.32 and 1.54 μm was observed in single-crystal S1−x−yGexCy grown nearly lattice matched upon Si(100) by chemical vapor deposition. Losses were <5 dB/cm at 1.54 μm. Experiments indicate that the band gap of three SiGeC alloy waveguides was in the 0.93–0.99-eV range, in agreement with theory.
© 1996 Optical Society of America
Original Manuscript: September 19, 1995
Published: March 1, 1996
Richard A. Soref, Ziv Atzman, McDonald Robinson, Richard Westhoff, and Farhad Shaapur, "Infrared waveguiding in Si1−x−yGexCy upon silicon," Opt. Lett. 21, 345-347 (1996)