High-extinction on–off modulators are essential for channel selection in integrated-optical sensor arrays. We report a standard SiON-technology-based electrostatically driven integrated mechano-optical waveguide on–off intensity modulator. On–off modulation is achieved by movement of an absorbing element into and out of the evanescent field of the guided mode. An extinction ratio of >37 dB at an actuation voltage of <30 V was achieved in a 6 mm×4 mm device for a wavelength of 632.8 nm. Full wafer-scale fabrication is made possible by use of chemical mechanical polishing and aligned wafer bonding.
© 1998 Optical Society of America
G. J. Veldhuis, C. Gui, T. Nauta, T. M. Koster, J. W. Berenschot, P. V. Lambeck, J. G. E. Gardeniers, and M. Elwenspoek, "Mechano-optical waveguide on-off intensity modulator," Opt. Lett. 23, 1532-1534 (1998)