Binary-phase zone-plate arrays based on hybrid solgel glass
Optics Letters, Vol. 23, Issue 24, pp. 1939-1941 (1998)
http://dx.doi.org/10.1364/OL.23.001939
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Abstract
An organically modified silane zirconate-based solgel material is used for the fabrication of binary-phase zone-plate arrays. The synthesized hybrid solgel material has a negative tone under UV exposure and can be patterned by a UV-lithography process. The transmittance of the material is nearly 100%, and the refractive index is 1.52. Two different diffractive lens arrays with focal lengths of 5 and 42 cm have been fabricated. The average roughness of the zone surface is less than 20 nm. The diffraction efficiencies of the lens arrays are measured as a function of modulation depth and exposure dose. A diffraction efficiency of 30% is achieved.
© 1998 Optical Society of America
[of America ]
OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(050.1970) Diffraction and gratings : Diffractive optics
(160.2750) Materials : Glass and other amorphous materials
(160.6060) Materials : Solgel
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
Citation
J. T. Rantala, *P. Äyräs, R. Levy, S. Honkanen, M. R. Descour, and N. Peyghambarian, "Binary-phase zone-plate arrays based on hybrid solgel glass," Opt. Lett. 23, 1939-1941 (1998)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-23-24-1939
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