OSA's Digital Library

Optics Letters

Optics Letters


  • Vol. 24, Iss. 5 — Mar. 1, 1999
  • pp: 297–299

Surface-profile measurement by means of a polarization Sagnac interferometer with parallel optical feedback

T. Shirai, T. H. Barnes, and T. G. Haskel  »View Author Affiliations

Optics Letters, Vol. 24, Issue 5, pp. 297-299 (1999)

View Full Text Article

Acrobat PDF (2300 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



We describe a novel feedback interferometer for real-time, unambiguous measurement of surface profiles that consists of a polarization Sagnac interferometer and an optically addressed phase-only spatial light modulator. In this system the output intensity from the Sagnac interferometer is optically fed back to the phase modulator placed in one arm of the interferometer, which produces a sawtooth fringe intensity profile (instead of the conventional cosinusoidal one) that is directly and unambiguously related to the surface profile. Preliminary experimental results demonstrate the feasibility of applying this system to surface-profile measurement.

© 1999 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(230.6120) Optical devices : Spatial light modulators

T. Shirai, T. H. Barnes, and T. G. Haskel, "Surface-profile measurement by means of a polarization Sagnac interferometer with parallel optical feedback," Opt. Lett. 24, 297-299 (1999)

Sort:  Author  |  Year  |  Journal  |  Reset


  1. For example, K. Creath, in Progress in Optics, E. Wolf, ed. (North-Holland, Amsterdam, 1988), Vol. XXVI, pp. 349–393.
  2. A. D. Fisher and C. Warde, Opt. Lett. 4, 131 (1979).
  3. A. D. Fisher and C. Warde, Opt. Lett. 8, 353 (1983).
  4. T. H. Barnes, T. Eiju, S. Kokaji, K. Matsuda, and N. Yoshida, Optik 96, 107 (1994).
  5. T. H. Barnes, T. Eiju, and K. Matsuda, Optik 101, 17 (1995).
  6. T. Yoshino, M. Nara, S. Mnatzakanian, B. S. Lee, and T. C. Strand, Appl. Opt. 26, 892 (1987).
  7. T. Suzuki, O. Sasaki, and T. Murayama, Appl. Opt. 28, 4407 (1989).
  8. A. R. D. Somervell, “Feedback interferometry for surface profile measurement,” M.S. thesis (University of Auckland, Auckland, New Zealand, 1996).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited