OSA's Digital Library

Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 25, Iss. 8 — Apr. 15, 2000
  • pp: 515–517

Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses

Todd A. Ballen, James R. Leger, Daniel E. Glumac, Lori S. Swanson, and Edward Gage  »View Author Affiliations


Optics Letters, Vol. 25, Issue 8, pp. 515-517 (2000)
http://dx.doi.org/10.1364/OL.25.000515


View Full Text Article

Acrobat PDF (720 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Mass-transport smoothing has been used to reduce the surface roughness of a gallium phosphide (GaP) microlens from 50.0 nm (rms) to 6.5 nm (rms) while preserving the original surface figure. The initial GaP surface was fabricated by dry-etch transfer of a polymer microlens into a GaP substrate. This result demonstrates that mass transport can significantly improve the performance of economically feasible high-refractive-index micro-optical elements having arbitrary surface profiles.

© 2000 Optical Society of America

OCIS Codes
(160.6000) Materials : Semiconductor materials
(220.4000) Optical design and fabrication : Microstructure fabrication
(240.5770) Optics at surfaces : Roughness
(350.3950) Other areas of optics : Micro-optics

Citation
Todd A. Ballen, James R. Leger, Daniel E. Glumac, Lori S. Swanson, and Edward Gage, "Use of mass transport to reduce surface roughness in replicated gallium phosphide refractive microlenses," Opt. Lett. 25, 515-517 (2000)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-25-8-515

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited