We have built a 1000μm-diameter silicon nitride deformable mirror for focus-control applications, using micro-optoelectromechanical systems technology. We achieved variable focal lengths from 36 to 360 mm while maintaining zero primary spherical aberration, using a maximum control voltage of 100 V. Active control of spherical aberration of approximately two waves at 660 nm was demonstrated.
© 2001 Optical Society of America
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(220.1000) Optical design and fabrication : Aberration compensation
(220.2560) Optical design and fabrication : Propagating methods
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.3950) Other areas of optics : Micro-optics
Phillip A. Himmer, David L. Dickensheets, and Robert A. Friholm, "Micromachined silicon nitride deformable mirrors for focus control," Opt. Lett. 26, 1280-1282 (2001)