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Optics Letters

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  • Vol. 26, Iss. 16 — Aug. 15, 2001
  • pp: 1280–1282

Micromachined silicon nitride deformable mirrors for focus control

Phillip A. Himmer, David L. Dickensheets, and Robert A. Friholm  »View Author Affiliations


Optics Letters, Vol. 26, Issue 16, pp. 1280-1282 (2001)
http://dx.doi.org/10.1364/OL.26.001280


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Abstract

We have built a 1000μm-diameter silicon nitride deformable mirror for focus-control applications, using micro-optoelectromechanical systems technology. We achieved variable focal lengths from 36 to 360 mm while maintaining zero primary spherical aberration, using a maximum control voltage of 100 V. Active control of spherical aberration of approximately two waves at 660 nm was demonstrated.

© 2001 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(220.1000) Optical design and fabrication : Aberration compensation
(220.2560) Optical design and fabrication : Propagating methods
(220.4000) Optical design and fabrication : Microstructure fabrication
(350.3950) Other areas of optics : Micro-optics

Citation
Phillip A. Himmer, David L. Dickensheets, and Robert A. Friholm, "Micromachined silicon nitride deformable mirrors for focus control," Opt. Lett. 26, 1280-1282 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-16-1280


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References

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