A MoRu–Be multilayer coating was applied to a diffraction grating to enhance the grating's normal-incidence efficiency near 11.4 nm wavelength. The holographic grating substrate had a blazed groove profile with 2400 grooves/mm and a microroughness of 0.8 nm. The efficiency in the second diffraction order, measured with synchrotron radiation, was 10.4% at a wavelength of 11.37 nm.
© 2001 Optical Society of America
C. Montcalm, S. Bajt, and J. F. Seely, "MoRu–Be multilayer-coated grating with 10.4% normal-incidence efficiency near the 11.4-nm wavelength," Opt. Lett. 26, 125-127 (2001)