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Optics Letters

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  • Vol. 26, Iss. 7 — Apr. 1, 2001
  • pp: 420–422

Compensation of phase change on reflection in white-light interferometry for step height measurement

Min-Cheol Park and Seung-Woo Kim  »View Author Affiliations


Optics Letters, Vol. 26, Issue 7, pp. 420-422 (2001)
http://dx.doi.org/10.1364/OL.26.000420


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Abstract

We present a method for compensating for the phase change on reflection in scanning white-light inteferometry that practically permits precise three-dimensional profile mapping of composite target surfaces that comprise multiple, dissimilar materials. The compensation method estimates the variation of phase change with the spectral distribution of the light source through a first-order approximation and then directly compensates for the measurement errors by performing two additional quasi-monochromatic phase-measuring interferometric measurements. Experimental results prove that the proposed compensation method is capable of reducing the measurement error in step height gauging to ±5 nm or less.

© 2001 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry

Citation
Min-Cheol Park and Seung-Woo Kim, "Compensation of phase change on reflection in white-light interferometry for step height measurement," Opt. Lett. 26, 420-422 (2001)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-26-7-420


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