Abstract

Mo–Sr multilayer mirrors were successfully deposited by dc-magnetron sputtering and characterized in situ with synchrotron radiation. Normal-incidence (3.6°) reflectance of 23.0% at 8.8 nm, 40.8% at 9.4 nm, and 48.3% at 10.5 nm were measured before the samples were exposed to air. After exposure, as a result of the reactivity of Sr with oxygen and water vapor, the reflectance of these multilayers decreased rapidly. Attempts to use thin layers of C to passivate the surface of these Mo–Sr multilayers were unsuccessful.

© 2001 Optical Society of America

Survey of Ti-, B-, and Y-based soft x-ray–extreme ultraviolet multilayer mirrors for the 2- to 12-nm wavelength region

Claude Montcalm, Patrick A. Kearney, J. M. Slaughter, Brian T. Sullivan, M. Chaker, Henri Pépin, and Charles M. Falco
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Structural characterization and lifetime stability of Mo/Y extreme-ultraviolet multilayer mirrors

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Mo/Y multilayer mirrors for the 8–12-nm wavelength region

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Mo/Y multilayer mirrors for the 8–12-nm wavelength region

Claude Montcalm, Brian T. Sullivan, M. Ranger, J. M. Slaughter, Patrick A. Kearney, Charles M. Falco, and M. Chaker
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In situ reflectance measurements of soft-x-ray/extreme-ultraviolet Mo/Y multilayer mirrors

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