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Optics Letters

Optics Letters


  • Vol. 27, Iss. 19 — Oct. 1, 2002
  • pp: 1720–1722

Real-time gray-scale photolithography for fabrication of continuous microstructure

Qinjun Peng, Yongkang Guo, Shijie Liu, and Zheng Cui  »View Author Affiliations

Optics Letters, Vol. 27, Issue 19, pp. 1720-1722 (2002)

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A novel real-time gray-scale photolithography technique for the fabrication of continuous microstructures that uses a LCD panel as a real-time gray-scale mask is presented. The principle of design of the technique is explained, and computer simulation results based on partially coherent imaging theory are given for the patterning of a microlens array and a zigzag grating. An experiment is set up, and a microlens array and a zigzag grating on panchromatic silver halide sensitized gelatin with trypsinase etching are obtained.

© 2002 Optical Society of America

OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(220.4000) Optical design and fabrication : Microstructure fabrication
(230.3720) Optical devices : Liquid-crystal devices

Qinjun Peng, Yongkang Guo, Shijie Liu, and Zheng Cui, "Real-time gray-scale photolithography for fabrication of continuous microstructure," Opt. Lett. 27, 1720-1722 (2002)

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  1. M. T. Gale, M. Rossi, and J. Pedersen, Opt. Eng. 33, 3556 (1994).
  2. E. B. Kley, B. Schnabel, and U. D. Zeitner, Proc. SPIE 3008, 22 (1997).
  3. P. Opplinger, J. M. Sixt, J. M. Stauffer, J. M. Mayer, P. Regnault, and G. Vorin, Microelectron. Eng. 23, 449 (1994).
  4. T. J. Suleski, and D. C. O'Shea, Appl. Opt. 34, 7507 (1995).
  5. W. Henke, W. Hoppe, H. J. Quenzer, P. S. Fischbach, and B. Wangner, Jpn. J. Appl. Phys. 33–1, 6809 (1994).
  6. A. Bertsch, S. Zissi, J. Y. Jezequel, and J. C. Andre, Microsyst. Technol. 3, 42 (1997).
  7. M. Farsari, S. Huang, P. Birch, F. Claret-Tournier, R. Young, D. Budgett, C. Bradfield, and C. Chatwin, Opt. Lett. 24, 549 (1999).
  8. S. Monneret, V. Loubere, and S. Corbel, Proc. SPIE 3680, 553 (1999).
  9. M. Born and E. Wolf, Principles of Optics, 6th ed. (Pergamon, Oxford, 1980), Chap. 10.
  10. A. Fimia, I. Pascual, and A. Belendez, Appl. Opt. 31, 4625 (1992).

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