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Optics Letters

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  • Vol. 28, Iss. 11 — Jun. 1, 2003
  • pp: 890–892

MSTAR: a submicrometer absolute metrology system

O. P. Lay, S. Dubovitsky, R. D. Peters, J. P. Burger, S.-W. Ahn, W. H. Steier, H. R. Fetterman, and Y. Chang  »View Author Affiliations


Optics Letters, Vol. 28, Issue 11, pp. 890-892 (2003)
http://dx.doi.org/10.1364/OL.28.000890


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Abstract

The Modulation Sideband Technology for Absolute Ranging (MSTAR) sensor permits absolute distance measurement with subnanometer accuracy, an improvement of 4 orders of magnitude over current techniques. The system uses fast phase modulators to resolve the integer cycle ambiguity of standard interferometers. The concept is described and demonstrated over target distances up to 1 m. The design can be extended to kilometer-scale separations.

© 2003 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5060) Instrumentation, measurement, and metrology : Phase modulation

Citation
O. P. Lay, S. Dubovitsky, R. D. Peters, J. P. Burger, S.-W. Ahn, W. H. Steier, H. R. Fetterman, and Y. Chang, "MSTAR: a submicrometer absolute metrology system," Opt. Lett. 28, 890-892 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-11-890


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