We report on the optimization of staircase grating profiles for the case of absorbing grating materials. Using a simple numerical algorithm, we determined the grating parameters, maximizing the first-order diffraction efficiency for different numbers of staircase steps. The results show that there is a significant difference between the staircase profiles for nonnegligible and negligible absorption. The obtained solutions are of importance for diffractive optics in the soft-x-ray and extreme-ultraviolet ranges.
© 2003 Optical Society of America
(050.1960) Diffraction and gratings : Diffraction theory
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography
(260.7200) Physical optics : Ultraviolet, extreme
(340.0340) X-ray optics : X-ray optics
Bernd Nöhammer, Christian David, Jens Gobrecht, and Hans Peter Herzig, "Optimized staircase profiles for diffractive optical devices made from absorbing materials," Opt. Lett. 28, 1087-1089 (2003)