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Optics Letters

Optics Letters


  • Vol. 28, Iss. 13 — Jul. 1, 2003
  • pp: 1087–1089

Optimized staircase profiles for diffractive optical devices made from absorbing materials

Bernd Nöhammer, Christian David, Jens Gobrecht, and Hans Peter Herzig  »View Author Affiliations

Optics Letters, Vol. 28, Issue 13, pp. 1087-1089 (2003)

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We report on the optimization of staircase grating profiles for the case of absorbing grating materials. Using a simple numerical algorithm, we determined the grating parameters, maximizing the first-order diffraction efficiency for different numbers of staircase steps. The results show that there is a significant difference between the staircase profiles for nonnegligible and negligible absorption. The obtained solutions are of importance for diffractive optics in the soft-x-ray and extreme-ultraviolet ranges.

© 2003 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(050.1970) Diffraction and gratings : Diffractive optics
(220.3740) Optical design and fabrication : Lithography
(260.7200) Physical optics : Ultraviolet, extreme
(340.0340) X-ray optics : X-ray optics

Bernd Nöhammer, Christian David, Jens Gobrecht, and Hans Peter Herzig, "Optimized staircase profiles for diffractive optical devices made from absorbing materials," Opt. Lett. 28, 1087-1089 (2003)

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