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Optics Letters

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  • Vol. 28, Iss. 14 — Jul. 15, 2003
  • pp: 1263–1265

Grating-enhanced through-wafer optical microprobe for mic roelectromechanical system high-resolution optical position feedback

J. M. Dawson, L. Wang, P. Famouri, and L. A. Hornak  »View Author Affiliations


Optics Letters, Vol. 28, Issue 14, pp. 1263-1265 (2003)
http://dx.doi.org/10.1364/OL.28.001263


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Abstract

We present modeling and experimental results from the use of a 1310-nm-wavelength through-wafer optical microprobe in conjunction with a microstructure grating to monitor the motion of a lateral comb resonator stage. The optical signal that results from shuttle interaction with the microprobe beam exhibits a peak-to-valley dynamic range that corresponds to 2-µm microstructure displacement, facilitating submicrometer positional resolution on digitization. This signal was used to achieve microstructure positional feedback and effective microsystem model parameter extraction, which are essential for structure control and model-based fault detection.

© 2003 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3940) Instrumentation, measurement, and metrology : Metrology
(130.0130) Integrated optics : Integrated optics

Citation
J. M. Dawson, L. Wang, P. Famouri, and L. A. Hornak, "Grating-enhanced through-wafer optical microprobe for mic roelectromechanical system high-resolution optical position feedback," Opt. Lett. 28, 1263-1265 (2003)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-28-14-1263


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References

  1. F. M. Dickey, S. C. Holswade, L. A. Hornak, and K. S. Brown, Sens. Actuators A 78, 220 (1999).
  2. P. R. Nelson, P. B. Chu, and K. S. J. Pister, Proc. SPIE 2640, 53 (1995).
  3. L. A. Hornak, P. Famouri, J. M. Dawson, and L. Wang, Proc. SPIE 4561, 221 (2001).
  4. E. J. Garcia and J. J. Sniegowski, Sens. Actuators A 48, 203 (1995).
  5. J. Dawson, J. Chen, K. Brown, P. Famouri, and L. A. Hornak, J. Opt. Eng. 39, 3239 (2000).
  6. J. M. Dawson, “Integrated through-wafer optical monitoring of MEMS for closed-loop control,” (West Virginia University, Morgantown, W. Va., 2002).
  7. B. E. A. Saleh and M. C. Teich, Fundamentals of Photonics (Wiley-Interscience, New York, 1991).
  8. J. M. Dawson, L. Wang, W. B. McCormick, S. A. Rittenhouse, P. Famouri, and L. A. Hornak, Proc. SPIE 4983, 34 (2003).

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