A spatial resolution of 20 nm is demonstrated at 2.07-nm wavelength by use of a soft x-ray microscope based on Fresnel zone plate lenses and partially coherent illumination. Nanostructural test patterns, formed by sputtered multilayer coatings and transmission electron microscopy thinning techniques, provide clear experimental results.
© 2003 Optical Society of America
Weilun Chao, Erik Anderson, Gregory P. Denbeaux, Bruce Harteneck, J. Alexander Liddle, Deirdre L. Olynick, Angelic L. Pearson, Farhad Salmassi, Cheng Yu Song, and David T. Attwood, "20-nm-resolution Soft x-ray microscopy demonstrated by use of multilayer test structures," Opt. Lett. 28, 2019-2021 (2003)