A laser terahertz-emission microscope (LTEM) system is proposed and developed for inspecting electrical faults in integrated circuits (IC). We test a commercial operational amplifier while the system is operating. Two-dimensional terahertz-emission images of the IC chip are clearly observed while the chip is scanned with a femtosecond laser. When one of the interconnection lines is cut, the damaged chip has a LTEM image different from that of normal chips. The results indicate that the LTEM system is a potential tool for IC inspection.
© 2003 Optical Society of America
Toshihiko Kiwa, Masayoshi Tonouchi, Masatsugu Yamashita, and Kodo Kawase, "Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits," Opt. Lett. 28, 2058-2060 (2003)