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Optics Letters

Optics Letters


  • Vol. 28, Iss. 21 — Nov. 1, 2003
  • pp: 2109–2111

Mode conversion and birefringence adjustment by focused-ion-beam etching for slanted rib waveguide walls

Po Shan Chan, H. K. Tsang, and C. Shu  »View Author Affiliations

Optics Letters, Vol. 28, Issue 21, pp. 2109-2111 (2003)

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We describe how focused-ion-beam (FIB) etching of slanted rib waveguide walls can be used to modify the differential group delay in a waveguide and introduce TE to TM mode conversion in a silicon-on-insulator rib waveguide. We achieved mode conversion by modifying the geometric cross section of a single-mode rib by FIB trimming. Waveguides with different lengths of 45° slant angle rib waveguide walls were fabricated and characterized. We measured the differential group delays and the mode conversion achieved for waveguides with different lengths of a FIB-trimmed slanted rib wall.

© 2003 Optical Society of America

OCIS Codes
(230.0230) Optical devices : Optical devices
(230.7370) Optical devices : Waveguides
(260.0260) Physical optics : Physical optics
(260.1440) Physical optics : Birefringence

Po Shan Chan, H. K. Tsang, and C. Shu, "Mode conversion and birefringence adjustment by focused-ion-beam etching for slanted rib waveguide walls," Opt. Lett. 28, 2109-2111 (2003)

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  1. G. Rickman, G. T. Reed, and F. Namavar, J. Lightwave Technol. 12,1771 (1994).
  2. E. Hecht, Optics, 4th ed. (Addison-Wesley, San Francisco, Calif., 2002).
  3. T. Ando, T. Murata, H. Nakayama, J. Yamauchi, and H. Nakano, IEEE Photon. Technol. Lett. 14,1288 (2002).
  4. H. Heidrich, P. Albrecht, M. Hamacher, H.-P. Nolting, H. Schroeter-Janssen, and C. M. Weinert, IEEE Photon. Technol. Lett. 4, 34 (1992).
  5. H. Porte, J.-P. Goedgebuer, R. Ferriere, and N. Fort, IEEE J. Quantum Electron. 25,1760 (1989).
  6. W. Y. Hwang, J. J. Kim, T. Zyung, M. C. Oh, and S. Y. Shin, IEEE J. Quantum Electron. 32,1054 (1996).
  7. V. P. Hiinkov, R. Opitz, and W. Sohler, J. Lightwave Technol. 6,903 (1988).
  8. S. S. A. Obayya, B. M. A. Rahman, K. T. V. Grattan, and H. A. El-Mikati, IEEE Photon. Technol. Lett. 13,681 (2001).
  9. E. A. J. Marcatilli, Bell Syst. Tech. J. 48,2071 (1969).

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