Abstract

High-quality templates of three-dimensional woodpile photonic crystals are fabricated in photoresist SU-8 by use of femtosecond laser lithography. The samples have smooth surfaces, are mechanically stable, and are resistant to degradation under environmental and chemical influences. Fundamental and higher-order photonic stopgaps are identified in the wavelength range $2.0–8.0 \mathit{\mu }\mathrm{m}$. These templates can be used for subsequent infiltration by optically active or high-refractive-index materials.

© 2004 Optical Society of America

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