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Optics Letters

Optics Letters

| RAPID, SHORT PUBLICATIONS ON THE LATEST IN OPTICAL DISCOVERIES

  • Vol. 29, Iss. 24 — Dec. 15, 2004
  • pp: 2861–2863

Ultrahigh-quality-factor silicon-on-insulator microring resonator

Jan Niehusmann, Andreas Vörckel, Peter Haring Bolivar, Thorsten Wahlbrink, Wolfgang Henschel, and Heinrich Kurz  »View Author Affiliations


Optics Letters, Vol. 29, Issue 24, pp. 2861-2863 (2004)
http://dx.doi.org/10.1364/OL.29.002861


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Abstract

The development of ultrahigh-quality-factor (Q) silicon-on-insulator (SOI) microring resonators based on silicon wire waveguides is presented. An analytical description is derived, illustrating that in addition to low propagation losses the critical coupling condition is essential for optimizing device characteristics. Propagation losses as low as 1.9±0.1 dB/cm in a curved waveguide with a bending radius of 20 μm and a Q factor as high as 139.000±6.000 are demonstrated. These are believed to be the highest values reported for a curved SOI waveguide device and for any directly structured semiconductor microring fabricated without additional melting-induced surface smoothing.

© 2004 Optical Society of America

OCIS Codes
(130.3120) Integrated optics : Integrated optics devices
(230.5750) Optical devices : Resonators

Citation
Jan Niehusmann, Andreas Vörckel, Peter Haring Bolivar, Thorsten Wahlbrink, Wolfgang Henschel, and Heinrich Kurz, "Ultrahigh-quality-factor silicon-on-insulator microring resonator," Opt. Lett. 29, 2861-2863 (2004)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-29-24-2861

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