Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating
Optics Letters, Vol. 29, Issue 24, pp. 2914-2916 (2004)
http://dx.doi.org/10.1364/OL.29.002914
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Abstract
We have measured the extreme-ultraviolet (EUV) efficiency of a polymer-overcoated blazed ion-etched holographic test grating. The grating had a magnetron-sputtered Mo2C /Si multilayer coating matched to the grating blaze angle of 2.78°. At an angle of incidence of 5.6° and a wavelength of 15.79 nm, the measured efficiency peaks in the second outside order at 29.9%. The derived groove efficiency is 53.0%. To the best of our knowledge these are the highest values obtained yet at EUV wavelengths from a holographic ion-etched blazed grating.
© 2004 Optical Society of America
OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1950) Diffraction and gratings : Diffraction gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(310.1620) Thin films : Interference coatings
Citation
M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, R. Lenke, H. Kierey, T. W. Barbee, Jr., and W. R. Hunter, "Record high extreme-ultraviolet efficiency at near-normal incidence
from a multilayer-coated polymer-overcoated blazed ion-etched holographic
grating," Opt. Lett. 29, 2914-2916 (2004)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-29-24-2914
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