Abstract
A complete module for single-photon counting and timing is demonstrated in a single chip. Features comparable with or better than commercially available macroscopic modules are obtained by integration of an active-quenching and active-reset circuit in complementary metal-oxide semiconductor technology together with a single-photon avalanche diode (SPAD). The integrated SPAD has a -diameter sensitive area and operates with an overvoltage above breakdown adjustable up to . With a overvoltage the photon detection efficiency peaks above 40% around , and the dark-counting rate is lower than at room temperature. The overall counting dead time is .
© 2005 Optical Society of America
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