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Optics Letters

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  • Editor: Anthony J. Campillo
  • Vol. 31, Iss. 11 — Jun. 1, 2006
  • pp: 1666–1668

Scalable multichannel micromachining with pseudo-nondiffracting vacuum ultraviolet beam arrays generated by thin-film axicons

Ruediger Grunwald, Uwe Neumann, Arkadi Rosenfeld, Jianzhao Li, and Peter R. Herman  »View Author Affiliations


Optics Letters, Vol. 31, Issue 11, pp. 1666-1668 (2006)
http://dx.doi.org/10.1364/OL.31.001666


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Abstract

Scalable multichannel microstructuring was demonstrated by multiplexing a focused molecular fluorine laser beam with cylindrical nanolayer microaxicons into an array of converging pseudo-nondiffracting sub beams. The axicons were fabricated by shadow-mask vapor deposition of magnesium fluoride onto substrates of identical material. Long-period surface gratings of variable pitch were generated on poly(methyl methacrylate) by varying the target position within the converging periodic focal lines.

© 2006 Optical Society of America

OCIS Codes
(140.2180) Lasers and laser optics : Excimer lasers
(140.3300) Lasers and laser optics : Laser beam shaping
(140.3390) Lasers and laser optics : Laser materials processing
(260.7200) Physical optics : Ultraviolet, extreme
(310.0310) Thin films : Thin films
(350.3950) Other areas of optics : Micro-optics

ToC Category:
Lasers and Laser Optics

History
Original Manuscript: January 27, 2006
Manuscript Accepted: February 23, 2006

Citation
Ruediger Grunwald, Uwe Neumann, Arkadi Rosenfeld, Jianzhao Li, and Peter R. Herman, "Scalable multichannel micromachining with pseudo-nondiffracting vacuum ultraviolet beam arrays generated by thin-film axicons," Opt. Lett. 31, 1666-1668 (2006)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-31-11-1666


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References

  1. P. R. Herman, R. S. Marjoribanks, A. Oettl, K. P. Chen, I. Konovalov, and S. Ness, Appl. Surf. Sci. 154-155577 (2000). [CrossRef]
  2. K. P. Chen, P. R. Herman, J. Zhang, and R. Tam, Opt. Lett. 26, 771 (2001). [CrossRef]
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  9. A. Marcinkevicius, S. Juodkazis, V. Mizeikis, S. Matsuo, and H. Misawa, in Proc. SPIE 4271, 150 (2001). [CrossRef]
  10. R. Grunwald, U. Neumann, V. Kebbel, H.-J. Kühn, K. Mann, U. Leinhos, H. Mischke, and D. Wulff-Molder, Opt. Lett. 29, 977 (2004). [CrossRef] [PubMed]
  11. R. Grunwald, H. Mischke, and W. Rehak, Appl. Opt. 38, 4117 (1999). [CrossRef]

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