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Frequency-comb-based interferometer for profilometry and tomography

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Abstract

A novel interferometry technique using a frequency-comb light source is proposed for surface profilometry and tomography of discontinuous objects. Surface profile measurement is performed by sweeping the comb interval frequency without mechanical scanning. Step heights of 0.5 and 1.0mm are successfully measured by use of the scheme with 9μm accuracy.

© 2006 Optical Society of America

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