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Optics Letters

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  • Editor: Anthony J. Campillo
  • Vol. 32, Iss. 2 — Jan. 15, 2007
  • pp: 124–126

Evanescent imaging with induced polarization by using a solid immersion lens

Tao Chen, Tom D. Milster, Seung-Hune Yang, and Delbert Hansen  »View Author Affiliations


Optics Letters, Vol. 32, Issue 2, pp. 124-126 (2007)
http://dx.doi.org/10.1364/OL.32.000124


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Abstract

Image contrast enhancement, high lateral resolution, and height information are obtained with induced polarization evanescent imaging using a solid immersion lens. Experiments are conducted by imaging features on a patterned Si substrate. Imaging theory is used to predict optimum orientation of high-spatial-frequency samples, and a topographical image is derived from the induced polarization image through a calibration procedure. A numerical aperture of 1.5 is used in the experiment. Height accuracy of ± 2 nm is demonstrated with a known sample.

© 2006 Optical Society of America

OCIS Codes
(110.0110) Imaging systems : Imaging systems
(110.0180) Imaging systems : Microscopy
(260.5430) Physical optics : Polarization
(350.5730) Other areas of optics : Resolution

ToC Category:
Imaging Systems

History
Original Manuscript: July 19, 2006
Revised Manuscript: October 2, 2006
Manuscript Accepted: October 5, 2006
Published: December 23, 2006

Citation
Tao Chen, Tom D. Milster, Seung-Hune Yang, and Delbert Hansen, "Evanescent imaging with induced polarization by using a solid immersion lens," Opt. Lett. 32, 124-126 (2007)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-32-2-124


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References

  1. S. M. Mansfield and G. S. Kino, Appl. Phys. Lett. 57, 2615 (1990). [CrossRef]
  2. Z. H. Liu, B. B. Goldberg, S. B. Ippolito, A. N. Vamivakas, M. S. Unlu, and R. Mirin, Appl. Phys. Lett. 87, 071905 (2005). [CrossRef]
  3. For example, the WYKO NT2000 Optical Profiler, produced by Veeco Metrology Group, Tucson, Arizona.
  4. T. Ishimoto, K. Saito, M. Shinoda, T. Kondo, A. Nakaoki, and M. Yamamoto, Jpn. J. Appl. Phys., Part 1 42, 2719 (2003). [CrossRef]
  5. B. Richards and E. Wolf, Proc. R. Soc. London, Ser. A 253, 358 (1959). [CrossRef]
  6. D. G. Flagello, T. Milster, and A. E. Rosenbluthk, J. Opt. Soc. Am. A 13, 53 (1996). [CrossRef]
  7. T. D. Milster, J. S. Jo, and K. Hirota, Appl. Opt. 38, 5046 (1999). [CrossRef]
  8. H. A. Macleod, Thin Film Optical Filters (McGraw-Hill, 1989).
  9. T. Chen, T. D. Milster, S. K. Park, B. McCarthy, D. Sarid, C. Poweleit, and J. Menendez, Opt. Eng. 45, 103002 (2002). [CrossRef]
  10. E. H. K. Stelzer, J. Microsc. 189, 15 (1998). [CrossRef]
  11. T. R. Corle, L. C. Mantalas, T. R. Kaack, and L. J. Lacomb, Appl. Opt. 33, 670 (1994). [CrossRef] [PubMed]

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