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Optics Letters

Optics Letters


  • Editor: Anthony J. Campillo
  • Vol. 32, Iss. 2 — Jan. 15, 2007
  • pp: 130–132

Polarization modulation imaging ellipsometer

Soichi Otsuki and Mitsuru Ishikawa  »View Author Affiliations

Optics Letters, Vol. 32, Issue 2, pp. 130-132 (2007)

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The polarization modulation technique was successfully combined with parallel synchronous detection using a switching light source and a CCD camera to realize full-frame measurement of ellipsometric parameters. The detected thickness of a monolayer film of n-octadecylsiloxane agreed well with theoretical and reported experimental values. The thickness resolution for imaging and the temporal noise in parallel thickness measurements were smaller than ± 0.1 nm and smaller than ± 0.02 nm , respectively.

© 2006 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(170.0110) Medical optics and biotechnology : Imaging systems
(310.6860) Thin films : Thin films, optical properties

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: September 29, 2006
Revised Manuscript: October 19, 2006
Manuscript Accepted: October 23, 2006
Published: December 23, 2006

Soichi Otsuki and Mitsuru Ishikawa, "Polarization modulation imaging ellipsometer," Opt. Lett. 32, 130-132 (2007)

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