Digitally enhanced heterodyne interferometry
Optics Letters, Vol. 32, Issue 22, pp. 3355-3357 (2007)
http://dx.doi.org/10.1364/OL.32.003355
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Abstract
Combining conventional interferometry with digital modulation allows interferometric signals to be isolated based on their delay. This isolation capability can be exploited in two ways. First, it can improve measurement sensitivity by reducing contamination by spurious interference. Second, it allows multiple optical components to be measured using a single metrology system. Digitally enhanced interferometry employs a pseudorandom noise (PRN) code phase modulated onto the light source. Individual reflections are isolated based on their respective delays by demodulation with the PRN code with a matching delay. The properties of the PRN code determine the degree of isolation while preserving the full interferometric sensitivity determined by the optical wavelength. Analysis and simulation indicate that errors caused by spurious interference can be reduced by a factor inversely proportional to the PRN code length.
© 2007 Optical Society of America
OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: June 22, 2007
Revised Manuscript: August 15, 2007
Manuscript Accepted: October 8, 2007
Published: November 14, 2007
Citation
Daniel A. Shaddock, "Digitally enhanced heterodyne interferometry," Opt. Lett. 32, 3355-3357 (2007)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-32-22-3355
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