Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis
Optics Letters, Vol. 33, Issue 17, pp. 1990-1992 (2008)
http://dx.doi.org/10.1364/OL.33.001990
Enhanced HTML 
Acrobat PDF (305 KB)
Abstract
We present a novel optical technique that produces nanometer dimensional measurement sensitivity using a conventional bright-field optical microscope, by analyzing through-focus scanning-optical-microscope images obtained at different focus positions. In principle, this technique can be used to identify which dimension is changing between two nanosized targets and to determine the dimension using a library-matching method. This methodology has potential utility for a wide range of target geometries and application areas, including nanometrology, nanomanufacturing, semiconductor process control, and biotechnology.
© 2008 Optical Society of America
OCIS Codes
(100.6640) Image processing : Superresolution
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(180.5810) Microscopy : Scanning microscopy
(150.1835) Machine vision : Defect understanding
(150.5495) Machine vision : Process monitoring and control
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: May 30, 2008
Manuscript Accepted: June 23, 2008
Published: August 27, 2008
Virtual Issues
Vol. 3, Iss. 11 Virtual Journal for Biomedical Optics
Citation
Ravikiran Attota, Thomas A. Germer, and Richard M. Silver, "Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis," Opt. Lett. 33, 1990-1992 (2008)
http://www.opticsinfobase.org/ol/abstract.cfm?URI=ol-33-17-1990
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Phase-shifting polarization interferometry for microstructure linewidth measurement (OL)
- Laser surface profiler (OL)
- Techniques for Measuring Aberrations in Lenses Used in Photolithography with Printed Patterns (AO)
- Spatiotemporal Phase Unwrapping for the Measurement of Discontinuous Objects in Dynamic Fringe-Projection Phase-Shifting Profilometry (AO)
- Pixel-Based Absolute Topography Test for Three Flats (AO)
Related Conference Papers
« Previous Article | Next Article »
OSA is a member of 