OSA's Digital Library

Optics Letters

Optics Letters


  • Editor: Alan E. Willner
  • Vol. 33, Iss. 3 — Feb. 1, 2008
  • pp: 258–260

Mid-infrared wire-grid polarizer with silicides

Itsunari Yamada, Kenji Kintaka, Junji Nishii, Satoshi Akioka, Yutaka Yamagishi, and Mitsunori Saito  »View Author Affiliations

Optics Letters, Vol. 33, Issue 3, pp. 258-260 (2008)

View Full Text Article

Enhanced HTML    Acrobat PDF (315 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



An infrared (IR) polarizer with tungsten silicide (WSi) wire grid was fabricated by two-beam interference exposure and reactive ion etching. To enhance TM transmittance, silicon monoxide was deposited between the WSi wire grid ( 400 nm period) and a Si substrate. The transmittance was over 80% in the 4 5 μ m wavelength range. The ratio of TM and TE transmittances was over 100 ( 20 dB ) in the 2.5 6 μ m wavelength range. The fabricated polarizer has higher durability and bettter compatibility with microfabrication processes compared with conventional IR polarizers.

© 2008 Optical Society of America

OCIS Codes
(230.5440) Optical devices : Polarization-selective devices
(310.1210) Thin films : Antireflection coatings
(220.4241) Optical design and fabrication : Nanostructure fabrication
(310.6628) Thin films : Subwavelength structures, nanostructures

ToC Category:
Optical Design and Fabrication

Original Manuscript: October 2, 2007
Revised Manuscript: December 10, 2007
Manuscript Accepted: December 13, 2007
Published: January 29, 2008

Itsunari Yamada, Kenji Kintaka, Junji Nishii, Satoshi Akioka, Yutaka Yamagishi, and Mitsunori Saito, "Mid-infrared wire-grid polarizer with silicides," Opt. Lett. 33, 258-260 (2008)

Sort:  Year  |  Journal  |  Reset  


  1. G. P. Nordin, J. T. Meier, P. C. Deguzman, and M. W. Jones, J. Opt. Soc. Am. A 16, 1168 (1999). [CrossRef]
  2. J. J. Wang, L. Chen, X. Liu, P. Sciortino, F. Liu, F. Walters, and X. Deng, Appl. Phys. Lett. 89, 141105 (2006). [CrossRef]
  3. G. R. Bird and M. Parrish, J. Opt. Soc. Am. 50, 886 (1960). [CrossRef]
  4. J. P. Auton, Appl. Opt. 6, 1023 (1967). [CrossRef] [PubMed]
  5. S. P. Murarka, Silicides for VLSI Application (Academic, 1986).
  6. E. Hecht, Optics (Addison-Wesley, 1998).
  7. E. D. Palik, Handbook of Optical Constants of Solids (Academic, 1998).
  8. H. MacLeod, Thin-Film Optical Filters (Adam Hilger, 1985).
  9. H. Kikuta, H. Toyota, and W. Yu, Opt. Rev. 10, 63 (2003). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3
Fig. 4 Fig. 5

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited